Mitutoyo Corporation

Atsushi Tominaga

Takashi Kanno

Toru Yaku

Kenichi Nakayama

Toshitaka Shimomura

Toshihiro Hasegawa

Kenichi Kojima

A reflection type encoder, which receives a plurality of light-receiving signals from a single scale, includes a light source, a scale having a plurality of patterns formed thereon to which light is irradiated from the light source, and a light-receiving element for receiving light reflected from each of the plurality of patterns, wherein a plurality of patterns each having different thicknesses are formed on a single track of the scale by using a dielectric substance, light of a plurality of wavelengths each having different brightnesses in accordance with differences in the thickness of the dielectric substance is irradiated from the light source, and a light-receiving signal is obtained for the respective thicknesses of the dielectric substance. Therefore, the scale can be downsized by overlapping a plurality of patterns on the same track.

Reflection type encoder, scale thereof and method for producing scale

A scale for a photoelectric encoder effectively protects the base of the scale from corrosion, rust, and flaws. The scale includes a base, a light-absorbing layer including a DLC layer formed on at least one surface of the base, and light-reflecting layers with a higher reflectance than that of the light-absorbing layer with respect to light falling within a wavelength range and formed into a grating on the light-absorbing layer.

Scale for photoelectric encoder

A first metal layer of tungsten is formed on a substrate in a scale. A second metal layer of chromium is formed on the first metal layer. The second metal layer is selectively removed with a mask of resist and an etching stopper of the first metal layer to form an optical grating.

Photoelectric encoder and method of manufacturing scales

There is provided a displacement measuring apparatus efficiently productive and easily applicable to high precise measurement of displacement with contact probe detection for hardly-measurable works in the art such as micro-works and deep parts in complicated structures. A scale member includes a spindle and a scale both supported by a parallel leaf spring movable on a scale substrate. The spindle is arranged in coaxial with a measurement axis in the scale member. The L & S slit-processed scale is integrated with the spindle and supported by the parallel leaf spring to move together with the spindle along the measurement axis. The spindle, scale and parallel leaf spring are coupled to the scale substrate interposing an anchor of the parallel leaf spring therebetween. The spindle, scale and parallel leaf spring are formed in an integral structure and only the anchor contacts the scale substrate while the spindle, scale and parallel leaf spring slightly float from the scale substrate. A displacement sensor comprises a sensor substrate arranged opposite to the scale substrate. A light source and a photosensitive device are located on the sensor substrate.

Scale member, method of producing the same and displacement measuring apparatus therewith

An implementation base ( ) is formed of a silicon substrate ( ) having a recess ( ) on a surface. Wire layers ( ) are formed on the silicon substrate ( ), continuously extending from the bottom of and via the side of the recess ( ) to the top surface. A semiconductor chip ( ) is implemented in the recess ( ) of the implementation base ( ) in a flip-chip manner to configure a functional device unit.

Functional device unit and method of producing the same

A transmission electrode and a detection electrode are placed in an electrode section of a sensor and are capacity-coupled with a reception electrode placed on an opposed scale. Capacity change between the transmission electrode and the reception electrode caused by displacement is detected with the detection electrode . A plurality of signals different in phase are supplied to the transmission electrode . The signal lines are wired like a zigzag using an upper layer and a lower layer and the distances between the signal lines and the detection electrode are made substantially equal for making uniform the crosstalk amounts relative to the detection electrode

Growing community of inventors

Kawasaki, Japan

Atsushi Tominaga