Screen Holdings Co., Ltd.

Kyoto Seisakusho Co., Ltd.

Maxell, Ltd.

Atsushi Tanaka

Koji Nishi

Toru Momma

Shigehiro Goto

Yasuhiro Fukumoto

Kenichiro Jo

Yukihiko Inagaki

Tsuyoshi Mitsuhashi

Masashi Kanaoka

Masanori Imamura

Hidetoshi Sagawa

Shinichi Takada

Kazuhiro Tadokoro

Kazuya Ono

Yoshihiro Todaka

Hiroshi Ido

Taiji Matsu

In a linear conveying device for conveying articles with a linear motor, of a plurality of shuttles, at least two are combined together to form a first operating group. In the first operating group, one of the shuttles in it is taken as a first master shuttle, and any other is taken as a first slave shuttle. The first master shuttle is controlled based on its position on the guide portion. The first slave shuttle is controlled based on its relative position from the first master shuttle.

Linear conveying device and control method thereof

A wireless power transfer system can be achieved at a low cost, can be used as both a power transmission apparatus and a power reception apparatus, and can cope with a change in coupling coefficient of a resonant coil of the power transmission apparatus and a resonant coil of the power reception apparatus. The wireless power transfer system is a power transmission apparatus that is able to perform bidirectional wireless power transmission, and includes the following: a power supply; a switching circuit that includes a plurality of switching devices; a resonator that includes a coil and a capacitor; a drive control circuit that controls an ON/OFF operation of each switching device of the switching circuit; and a detector that detects a resonance current flowing through the switching circuit. The drive control circuit controls the ON/OFF of each switching device of the switching circuit to perform a power transmission operation or a power reception operation based on a resonant current waveform detected by the detector.

Wireless power transfer system, power transmission apparatus, and power reception apparatus

A linear conveyor to transport an article includes a base platform provided with a stator, movers configuring the linear motor and holding members for holding an article provided on the movers. The holding member is arranged at a position which is radially outwardly apart from the traveling track of the mover by a predetermined distance. When the movers travel on a curved traveling track served by the stator, the controller controls the interval of the adjacently arranged movers to narrower than the interval when the movers travel on an immediately preceding linear traveling track, and so that when the movers travel on a linear traveling track on the stator, the interval between the adjacently arranged movers is wider than the interval when the movers travel on the immediately preceding curved traveling track, thereby setting the interval between the holding members of the adjacently arranged movers to be constant.

Linear conveyor

A treating liquid vaporizing apparatus includes a buffer tank for storing a treating liquid, a vaporizing container connected to the buffer tank for vaporizing the treating liquid, a further vaporizing container connected to the buffer tank in parallel with the vaporizing container for vaporizing the treating liquid, a switch valve for opening and closing a flow path of the treating liquid between the buffer tank and the vaporizing container, and a switch valve for opening and closing a flow path of the treating liquid between the buffer tank and the further vaporizing container.

Treating liquid vaporizing apparatus

An upper plate on which a substrate is placed is cooled or heated by a thermal processor. The temperature of the thermal processor is adjusted by a temperature adjuster. The temperature of the upper plate is detected. A control value that is to be applied to the temperature adjuster in order to maintain the temperature of the upper plate at a set value is calculated as a control arithmetic value on the basis of the detected temperature. When the control arithmetic value decreases to a value less than a second threshold value, a first control that applies the control arithmetic value to the temperature adjuster is performed. When the control arithmetic value increases to a value not less than a first threshold value, a second control that applies a control set value higher than the control arithmetic value to the temperature adjuster is performed.

Thermal processing apparatus and thermal processing method

A substrate treating method includes a determining step for determining a treating condition for hydrophobizing a surface of a substrate, based on a target regarding a dissolved area size in a resist pattern, and a treating step for hydrophobizing the surface of the substrate with the treating condition determined in the determining step before forming resist film on the surface of the substrate.

Substrate treating method

Substrate treating apparatus including a cover that covers a substrate on a plate. The cover undersurface is substantially horizontal and adjacent to a surface of the substrate. Through a gas flow path, a treatment gas is supplied to the substrate. The gas flow path includes a swirl chamber, a diameter contraction chamber, and a diameter expansion chamber. In the swirl chamber, the treatment gas flows around the central axis. The diameter contraction chamber is disposed below and in communication with the swirl chamber, and has an inner diameter that decreases from its upper end toward its lower end. The diameter expansion chamber is disposed below and in communication with the diameter contraction chamber, and has an inner diameter that increases from its upper end toward its lower end. The lower end of the diameter expansion chamber includes an opening on the undersurface of the cover.

Growing community of inventors

Kyoto, Japan

Atsushi Tanaka