Nikon Corporation

Asahi Kasei Kabushiki Kaisha

Renesas Electronics Corporation

Mitsubishi Heavy Industries Limited

Thk Co., Ltd.

Sony Corporation

Hitachi Medical Corporation

Canon Kabushiki Kaisha

Kabushiki Kaisha Toshiba

Hitachi, Ltd.

Kao Corporation

Nippon Steel Corporation

Shimadzu Corporation

Konica Corporation

Mitsubishi Paper Mills Limited

Atsushi Suzuki

Tsuyoshi Eguchi

Kouichi Nishimura

Kenji Maio

Yasushi Taniyama

Mitsuhiro Oshiki

Saburo Masugi

Seiji Sato

Koji Takahashi

Hajime Yamamoto

Yasuhiro Watanabe

Takayuki Kobayashi

Takashi Shoji

Tomohiko Shibata

Yoshinori Abe

Kazuki Watanabe

Kohei Sato

Toshiyuki Takahashi

Takashi Futami

Yoshifumi Tomita

Hayato Wakabayashi

Naoki Kawazu

Tomoyuki Suzuki

Yasuo Tsubai

Atsushi Noda

Ichiro Sakamoto

Hiroyuki Moritomo

Takashi Kataoka

Masahide Yatsu

Takashi Igarashi

Hironori Wakana

Hiroki Yamazaki

Tsuyoshi Haraguchi

Toshihiro Kawai

Junichiro Hara

Masafumi Iwashiro

Junji Kato

Hiroshi Tomiyama

Takumi Oka

Yoshihito Narita

Toru Kawabe

Kazuma Matsui

Nobusato Morishige

Ken Okauchi

Kazuhisa Kobayashi

Yuki Hidaka

Takashi Shimada

Toshihiro Yagisawa

Yoshinao Komatsu

Takashi Deguchi

Taka-Aki Sato

Nobutaka Shimamura

Norihiro Nikai

Masaki Takeuchi

Junya Yamashita

Makoto Asaumi

Hiroto Niimi

Mitsuo Natsume

Tomohiro Yamauchi

Akifumi Morinaka

Morikuni Kubo

Kanako Hatayama

Kenji Ishida

Yasuhiro Mayumi

Tuyosi Hattori

Keigo Koida

Keiji Yoshii

Hiroyuki Hisamichi

Yuuki Yamagata

Shiro Fujita

Kazuhisa Tsunoyama

Shozo Takada

Masayasu Yoshino

Daisuke Aoki

Teruyuki Tamaki

Atsuhiko Toyama

Yasutoshi Aibara

Kazuhiko Iikubo

Naomitsu Watanabe

Kazuyuki Kamiya

Minoru Kaneko

Tomoya Suenaga

Kiyoshi Ohta

Ikumi Kuriwaki

Yoshinori Iwai

Haruhiko Atsumi

Kazunori Takagi

Masaaki Fukunaga

Kengo Ijima

Tomoya Mizutani

Kotaro Kawai

Tatsuhito Azegami

Kozo Miyasaka

Hiroshi Kohama

Hiroyuki Nomura

Yuka Kanada

Kazuo Tokuzaki

Taro Yoshida

Toshiki Kainuma

Masahiko Takahashi

A method for precise plasma etching of micropatterns on a silicon substrate containing silicon or additionally having a silicon oxide film. An etching method for plasma-etching a silicon substrate having silicon or a silicon oxide film using a halogen fluoride having a nitrogen (N) content of 1 vol % or less as an etching gas. Also disclosed is a method for producing a semiconductor using the etching method.

Etching method using halogen fluoride and method for producing semiconductor

A method for measuring the concentration of fluorine gas, which includes irradiating a halogen fluoride-containing gas with ultraviolet light in which the ratio (W/W) of the maximum value (W) of ultraviolet light intensity in the wavelength region of less than 250 nm with respect to the ultraviolet light intensity (W) at a wavelength of 285 nm is 1/10 or less, and measuring the absorbance at a wavelength of 285 nm to obtain the concentration of fluorine gas contained in the halogen fluoride-containing gas.

Method for measuring concentration of fluorine gas contained in halogen fluoride-containing gas by ultra violet spectroscopy

A method for measuring the concentration of fluorine gas (F) contained in a halogen fluoride-containing gas using an analysis apparatus having a halogen fluoride-containing gas supply source, a fluorine-containing gas supply source, a tube, a capillary, and a mass spectrometer, the method including, before measuring the concentration of fluorine gas, performing passivation treatment on the tube and the capillary using a passivation gas containing a fluorine-containing gas supplied from the fluorine-containing gas supply source.

Method for measuring concentration of fluorine gas in halogen fluoride-containing gas using mass spectrometer

A first lens group (G1) having positive refractive power, a second lens group (G2) having negative refractive power, a third lens group (G3) having positive refractive power, a fourth lens group (G4) having negative refractive power, and a fifth lens group (G5) having positive refractive power are arranged in order from an object, and zooming is performed by changing distances between each lens group, and the first lens group (G1) is composed of three or more lenses, the fourth lens group (G4) is composed of two or less lenses, and the fifth lens group (G5) is composed of two or less lenses and moves to an image surface side upon zooming from a wide angle end state to a telephoto end state, and the following conditional expression (1) is satisfied.8.40<1/(−2)  (1)

Zoom lens, optical apparatus and method for manufacturing the zoom lens

A carbon foam formed of carbon fibers, where, at 90% or more of any 20 locations, the carbon fibers have a fiber diameter that is within &#xb1;20% of an average fiber diameter.

Carbon foam, assembly and manufacturing method

A method for removing a halogen fluoride in a mixed gas by reacting the mixed gas containing a halogen fluoride including bromine or iodine with a removing agent, wherein the removing agent is a chloride, bromide or iodide of potassium, sodium, magnesium, calcium and barium. Also disclosed is a quantitative analysis method as well as a quantitative analyzer for a gas component contained in a hydrogen fluoride mixed gas, the method characterized by reacting a mixed gas containing a halogen fluoride and another gas component with a removing agent, thereby removing the halogen fluoride in the mixed gas, further removing produced by-products, and quantitatively analyzing a residual gas by a gas chromatograph.

Method for removing halogen fluoride, quantitative analysis method for gas component contained in halogen fluoride mixed gas, and quantitative analyzer

A carbon foam comprising linear portions and node portions joining the linear portions, wherein the linear portions have a diameter of 0.1 &#x3bc;m or more and 10.0 &#x3bc;m or less, and the carbon foam has a surface with an area of 100 cmor more.

Carbon foam and manufacturing method thereof

There is provided an exhaust nozzle unit capable of discharging a gas atmosphere in a substrate storage container having a loading/unloading opening from the container to an outside of the container through a port formed on a bottom surface of the container. The exhausted nozzle includes a nozzle capable of switching the port from a closed state to an open state by pressing a valve of the port; and a housing configured to hold the nozzle so as to be movable up and down between a use posture in which the port is in the open state and a standby posture in which the port is in the closed state.

Exhaust nozzle unit, load port, and EFEM

It is an object of the present disclosure to provide a thin-film carbon foam and a method of manufacture the same. It is another object of the present disclosure to provide a stack carbon foam having fewer through holes and a method of manufacturing the same. The carbon foam of the present disclosure is, for example, a stack carbon foam being a stack of at least two monolayer carbon foams stacked one another, each monolayer carbon foam comprising linear portions and node portions joining the linear portions, or a carbon foam comprising linear portions and node portions joining the linear portions, wherein the ratio of the number of large through holes having a diameter of 1 mm or more to the surface area of the carbon foam is 0.0003/mmor less.

Carbon foam, stack carbon foam, and method of manufacturing stack carbon foam

A method for manufacturing a grain-oriented electrical steel sheet including a step of hot-rolling a slab containing a predetermined component composition with a remainder including Fe and an impurity to obtain a hot-rolled steel sheet, a step of, after carrying out hot-rolled steel sheet annealing on the hot-rolled steel sheet, carrying out cold rolling to obtain a cold-rolled steel sheet, a step of carrying out primary recrystallization annealing including a rapid temperature increase at an average temperature increase velocity V of 400&#xb0; C./s or more and imparting of a steel sheet tensile force S on the cold-rolled steel sheet, and a step of applying an annealing separating agent to a surface of the cold-rolled steel sheet after the primary recrystallization annealing and then carrying out flattening annealing.

Method for manufacturing grain-oriented electrical steel sheet and grain-oriented electrical steel sheet

Provided is a carbon foam and a membrane electrode assembly having linear portions and node portions joining the linear portions; and a carbon foam and a membrane electrode assembly having linear portions and node portions joining the linear portions, where the carbon content is 51 mass % or more, and the mean deviation of coefficient of friction by the Kawabata evaluation system method is 0.006 or less.

Carbon foam and membrane electrode assembly

A bass screw can move balls smoothly in a return path of a circulating component. The ball screw includes: a screw shaft having a helical ball rolling groove on an outer peripheral surface thereof; a nut having a helical loaded ball rolling groove facing the ball rolling groove, on an inner peripheral surface thereof; a circulating component where at least part of a return path connecting one end and the other end of the loaded ball rolling groove of the nut is formed; and a plurality of balls that can circulate. A contact portion that contacts the ball at two or more points is formed on an outer peripheral side of the return path of the circulating component. The contact portion of the circulating component is twisted in accordance with a change in the direction of a centrifugal force that acts on the ball.

Ball screw

A screw device is provided which can facilitate management of a tolerance of a recess where a circulation component is housed. A circulation component is housed in a recess of a nut with clearance. At least part of the circulation component is blocked by a lid member fixed to the nut by fastening means. Upon a centrifugal force acting on a rolling element moving along a circulation path in the circulation component, the circulation component comes into contact at three points with the recess as viewed in an axial direction.

Screw device

The present invention provides an adhesive resin layer, which can prevent generation of air bubbles even when adhered to a substrate having a high level difference, and can maintain transparency, an adhesive resin film, a laminate, and a method of producing a laminate. More specifically, the present invention is a monolayered adhesive resin layer comprising an acrylic-based adhesive resin composition having transparency, wherein the adhesive resin composition contains an acrylic-based polymer, an acrylic-based monomer, and a thermopolymerization initiator, and an adhesive resin layer has pressure sensitive adhesiveness on both surfaces at an ambient temperature, and can be thermally cured by heating at a temperature of 100 to 250&#xb0; C. and a time of 30 seconds to 10 minutes.

Adhesive resin layer, adhesive resin film, laminate, and method of producing laminate

A first lens group (G) having positive refractive power, a second lens group (G) having negative refractive power, a third lens group (G) having positive refractive power, a fourth lens group (G) having negative refractive power, and a fifth lens group (G) having positive refractive power are arranged in order from an object, and zooming is performed by changing distances between each lens group, and the first lens group (G) is composed of three or more lenses, the fourth lens group (G) is composed of two or less lenses, and the fifth lens group (G) is composed of two or less lenses and moves to an image surface side upon zooming from a wide angle end state to a telephoto end state, and the following conditional expression (1) is satisfied.8.40&#x3c;1/(&#x2212;2)&#x2003;&#x2003;(1)

Growing community of inventors

Tokyo, Japan

Atsushi Suzuki