Tokyo Electron Limited

Atsushi Suzuki

Takahiko Kato

Yoshitaka Konishi

Motoi Okada

Junya Sato

Nao Akashi

Takuro Tsutsui

Kazuya Uoyama

Kei Sano

Yuta Haga

Daisuke Oku

Hiroyuki Sato

Takayuki Kita

Yoshitada Honda

Kiwamu Tsukino

A highly versatile data processing is implemented on data collected in a manufacturing process. A data processing device includes: a calculation part configured to collect a plurality of data groups associated with a predetermined step of a process, and calculate effects in the predetermined step for each of the plurality of data groups; a dividing part configured to divide a feature space such that a distribution of each of the plurality of data groups associated with the predetermined step in the feature space is classified for each of the calculated effects; and an output part configured to output specific data that specifies respective regions of the divided feature space.

Data processing device, data processing method, and non-transitory computer-readable recording medium

According to an aspect of the present disclosure, a substrate state determining apparatus includes: an image capturing unit that captures an image of a substrate placed on a stage; a learning unit that executes a machine learning using training data in which information indicating a state of the substrate is attached to the image of the substrate, so as to generate a substrate state determination model in which the image of the substrate is taken as an input and a value related to the state of the substrate corresponding to the image of the substrate is taken as an output; and a determination unit that determines the state of the substrate corresponding to the image of the substrate captured by the image capturing unit, using the substrate state determination model generated by the learning unit.

Substrate state determining apparatus, substrate processing apparatus, model generating apparatus, and substrate state determining method

A clean-room monitoring device for monitoring the interior of a clean-room having a floor in which a removable cover such as a grating or a non-porous cover is disposed, includes: a monitoring camera which captures an image of the removable cover; a monitor which detects the existence of an opening exposed when the removable cover is removed, based on an image signal obtained from the monitoring camera, detects the presence of a workman approaching the opening if it is detected that the opening exists, and outputs a warning signal if the workman is detected; and a warning generator which receives the warning signal from monitor and issues a warning.

Clean-room monitoring device and method for monitoring clean-room

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Sapporo, Japan

Atsushi Suzuki