Toyota Jidosha Kabushiki Kaisha

Hamamatsu-photonics K.k.

Osaka University

Atsushi Sunahara

Hiroyuki Furukawa

Hirofumi Kan

Toshiyuki Kawashima

Naoki Nakamura

Osamu Komeda

Takashi Sekine

Takashi Kurita

Noriaki Miyanaga

Kazuhisa Fujita

Hirozumi Azuma

Yasukazu Izawa

Yoshinori Shimada

Nakahiro Satoh

Shinichiro Okihara

Katsunobu Nishihara

Katsuhiro Ishii

Yasuhiko Nishimura

Yoneyoshi Kitagawa

Yoshitaka Mori

Masakatsu Murakami

Mitsuo Nakai

Keiji Nagai

Takayoshi Norimatsu

Ryohei Hanayama

Hiroaki Nishimura

Tatsuhiko Yamanaka

Takahiro Hibino

Tomoharu Okuno

Masahiro Nakatsuka

Keisuke Shigemori

Shigeaki Uchida

Vasilli Zhakhovski

Ryouji Matsui

A target shell monitoring devicethat monitors an attitude and a position of the target shell Tg, a compression laser output devicethat irradiates the target shell Tgwith a compression laser light LS, and a heating laser output devicethat irradiates the target shell Tgwith a heating laser light LSfollowing the compression laser light LSare provided. The target shell Tghas a hollow spherical shell shape, includes an approximately spherical space Sp on an inner side thereof, includes at least one through hole Hconnecting an outer side thereof and the space Sp, and includes, on an outer surface Sfthereof, irradiation areas Arand Arto be irradiated with compression laser lights.

Laser fusion device and nuclear fusion generating method

An object of the present invention is to provide an extreme ultraviolet light source target which can emits extreme ultraviolet light with high emission efficiency. A solid target made of heavy metal or heavy-metal compound and having a density 0.5 to 80% that of the crystal density is used. When the target is irradiated with a laser beam, plasma of the heavy metal contained in the target is generated, and extreme ultraviolet light having a predetermined wavelength which corresponds to the kind of the heavy metal is emitted from the plasma. When the density of the target is made to be smaller than the crystal density as described above, space distribution of the density of the generated plasma can be controlled, and the region in which plasma absorbs energy of the laser beam overlaps the region in which the plasma emits the extreme ultraviolet light. Thus, emission efficiency can be improved, preventing energy loss. For example, in a case where the SnOtarget having a density 24% of the crystal density is used, the emission efficiency at around 13.5 nm wavelength is higher than in the case where a Sn crystal target is used.

Extreme ultraviolet light source and extreme ultraviolet light source target

Growing community of inventors

Osaka, Japan

Atsushi Sunahara