Shin-etsu Polymer Co., Ltd.

Atsushi Sumi

Takayuki Nakayama

Junya Toda

A substrate storage container includes: a container body of a front open box type for holding a multiple number of semiconductor wafers supported in alignment by supporting ribs; a bottom plate removably attached to the bottom of the container body; and a pair of conveyor contact rails integrally formed along both the left and right sides of this bottom plate. These conveyor contact rails inhibit vibrations and impacts acting on the semiconductor wafers when the sealed container body is conveyed by a conveyor.

Substrate storage container

A container bodyfor accommodating a multiple number of precision substrates in alignment, a door element for opening and closing the open front of container bodyand a multiple number of positioning partsarranged on the bottom of container bodyare provided. Each positioning partis formed as a concave portion with a pair of parallel ribsformed on the bottom surface of container bodyand inner surfacesof curved portionsof a trackformed in a bottom plate. Inner surfacesof trackare formed to be inclined linearly becoming gradually wider downwards from their top while the upper ends of inner surfacesare extended to an opposing arealocated between the lower ends of paired parallel ribs

Substrate storage container and positioning method of the same

A substrate storage container includes a container body for accommodating and aligning semiconductor wafers, a door which opens and closes the front of the container body and a pair of valve units disposed at the bottom of the container body for controlling gas flow. Each valve unit includes a fixed sleeve for gas flow, fitted in a rib of a through-hole of the container body, a holding sleeve fitted in the through-hole of the container body with an o-ring interposed therebetween and mated and threaded with the fixed sleeve, a check valve built between the fixed sleeve and the holding sleeve, leaving a clearance, an elastically deformable element for opening and closing the check valve, an interior lid sleeve for gas flow, opposing the check valve and supporting the elastically deformable element, and a filter interposed between the holding sleeve and the interior lid sleeve.

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Itoigawa, Japan

Atsushi Sumi