Terumo Kabushiki Kaisha

Atsushi Sone

Mitsuteru Kimura

Takehisa Mori

Kiyoshi Komatsu

Takeshi Shimomura

Norihiko Ushizawa

The disclosed infrared sensor comprises a substrate provided with a bridging part and a sensing part made of an infrared temperature-sensitive film formed on the bridging part. A first lid member covers the sensing part and bridging part and a second lid member covers the reverse surface of the substrate and tightly seals a cavity formed between the substrate and the bridging part. The invention preferably comprises an electrode pad electrically connected to the infrared temperature sensitive film and formed of a laminate film including an etchant-resistant electrically conductive film. The invention provides an infrared sensor with a small stable bridging structure which allows easy formation of a contact hole on an electrode pad without causing a breakage of the bridging part. A method for the production of an infrared sensor is also disclosed.

Infrared sensor and method for production thereof

An infrared sensor including a substrate provided with a bridging part; a detecting part composed of an infrared temperature-sensitive film formed in the bridging part; an electrode pad formed of a laminate film and an etchant-resistant electrically conductive film electrically connected to the infrared temperature-sensitive film; a first lid covering the detecting part and the bridging part; and a second lid covering another surface of the substrate and tightly closing a cavity formed between the substrate and the bridging part.

A calibration solution, which is used when measuring the ion concentration of solution under examination such as blood or other body fluids using a pH sensor or the like ion sensor with a solid electrode, is prepared by adding NaCl to a standard buffer solution and thus setting the ionic strength of the solution to be substantially identical with the ionic strength of solution under examination. A sensor calibration method is also disclosed, in which at least two reference calibration solutions having different pH values are prepared, the electromotive force of the sensor in these calibration solutions is measured by immersing the sensor in the solutions, and a calibration formula is produced from the electromotive force for the pH values of the reference calibration solutions. A predetermined amount of bicarbonate buffer solution is added to the calibration solution to maintain a substantially constant ionic strength of the solution, thus permitting simultaneous calibration of an ion sensor and a gas sensor.

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Ashigarakami, Japan

Atsushi Sone