Ebara Corporation

Tokyo Electron Limited

Atsushi Shiokawa

Matsutaro Miyamoto

Toshiharu Nakazawa

Hiroshi Sobukawa

Tetsuro Sugiura

Norio Kimura

Hirosi Sobukawa

Junichi Arami

Hiroyuki Kawasaki

Shinichi Sekiguchi

Naoya Yoshida

Toru Osuga

Yoshinori Ojima

Tetsuo Komai

Keiichi Ishikawa

Takashi Kyotani

Hiroaki Ogamino

Masashi Obuchi

Takashi Hozumi

Hiroyuki Chino

Keiji Maishigi

Atsusi Ooyama

Shinichiro Sasaki

Yasuto Niina

A control device that controls a target vacuum pump including a motor, including: a decision unit that decides, using at least one of target state quantities at a time of a past stop process of the target vacuum pump or another vacuum pump wherein the target state quantities are state quantities which fluctuate in accordance with a load at a time of a process of stopping a vacuum pump, a normal fluctuation range or a normal time fluctuation behavior of the target state quantity at the time of the stop process; and a control unit that controls the motor, wherein the control unit compares the target state quantity at the time of the process of stopping the target vacuum pump with the normal fluctuation range or the normal time fluctuation behavior, and changes a method of controlling the motor during the stop process depending on the comparison result.

Control device, control system, control method, recording medium and machine learning device

The present invention relates to a vacuum evacuation system used to evacuate a processing gas from one or more process chambers for use in, for example, a semiconductor-device manufacturing apparatus. The vacuum evacuation system is a vacuum apparatus for evacuating a gas from a plurality of process chambers (). The vacuum evacuation system includes a plurality of first vacuum pumps () coupled to the plurality of process chambers () respectively, a collecting pipe () coupled to the plurality of first vacuum pumps (), and a second vacuum pump () coupled to the collecting pipe ().

Vacuum evacuation system

A turbo-molecular pump includes a casing having an intake port, a stator fixedly mounted in the casing, and a rotor supported in the casing for rotation relatively to the stator. The stator and the rotor make up a turbine blade pumping section and a groove pumping section for evacuating gas. A scattering prevention member is provided for preventing fragments of the rotor from being scattered through the intake port.

Turbo-molecular pump

A magnetic suspending device which can detect the temperature of a controlled object and assure a safe operation thereof without any need for any special construction or work to the device and any special maintenance is disclosed. In the magnetic suspending device comprising a pair of electromagnets (,) disposed opposite to each other, a magnetizable controlled object (,) disposed between the pair of electromagnets (,) and position displacement detection sensors (,) disposed opposite to each other for detecting a position displacement of the controlled object (,), wherein detection signals from the position displacement detection sensors (,) are inputted to a control circuit unit (,) for performing phase compensation and gain adjustment, wherein control outputs from the control circuit unit (,) control magnetic attractive or repulsive forces of the pair of electromagnets (,), and wherein the controlled object is magnetically suspended by the pair of electromagnets without contact at an arbitrary position, a temperature operational circuit unit (,) is provided for detecting the size and temperature of the controlled object (,) using the detection signals from the position displacement detection sensors (,).

Magnetic suspending device controlled by temperature of controlled object

A turbomolecular pump comprising a rotor and a stator housed in a casing and forming an exhaust channel therebetween, and a suction port and a discharge port formed in the casing; wherein the turbomolecular pump has a valve body for opening and closing the suction port, the valve body is movable in an axial direction of the turbomolecular pump, a valve driving mechanism for driving the valve body via a valve body supporting member which extends through a throughhole formed in the rotor and/or the stator and magnetic bearing units for non-contactingly supporting the valve body supporting member within the throughhole, whereby a turbomolecular pump having a compact overall construction including valve units can be provided.

Turbomolecular pump

A turbomolecular pump comprising a rotor and a stator housed in a casing and an exhaust mechanism is formed between the rotor and the stator; wherein the turbomolecular pump has a valve body for opening and closing a suction port provided in the casing, and a valve driving mechanism for opening/closing-driving the valve body, wherein the valve driving mechanism is provided integrally with the turbomolecular pump.

A turbomolecular pump evacuates gas in an apparatus (or a chamber) by means of a rotor having blades and/or spiral grooves which rotates at a high speed. The turbomolecular pump includes a casing housing a rotor and a stator therein, a pumping section comprising the rotor and the stator, a valve element capable of opening or closing an intake port of the casing, and a supporting member for supporting the valve element. The supporting member extends through at least one of the rotor and the stator. The turbomolecular pump further includes an actuating mechanism for actuating the valve element, and the actuating mechanism is provided at a side opposite to the intake port with respect to the rotor.

Growing community of inventors

Tokyo, Japan

Atsushi Shiokawa