Shin-Etsu Quartz Products Co., Ltd.

Heraeus Quarzglas Gmbh & Co Kg

Atsushi Shimada

Akira Fujinoki

Hiroyuki Nishimura

Kyoichi Inaki

Toshiyuki Kato

Toshikatsu Matsuya

Akira Sato

Nobumasa Yoshida

Yuya Yokosawa

Tatsuya Mori

Katsuhide Orikasa

Tomoichi Kumata

Makoto Tanaka

Hiromi Tarukawa

Provided is a titanium-containing quartz glass having excellent UV absorption. The quartz glass absorbs ultraviolet rays having a wavelength of 250 nm or less, ozone generation-related adverse effects on the human body, are prevented, a decrease in transmittance of the quartz glass in the range from near-ultraviolet to visible light due to being colored when irradiated with ultraviolet rays does not occur, absorption build-up or lamp burst-inducing deformation build-up, which is caused by a structural change in the quartz glass that occurs in the range of 200-300 nm when irradiated with ultraviolet rays, is suppressed, and a decrease in transmittance at intended wavelength ranges does not occur even when exposed to ultraviolet rays. The titanium-containing quartz glass having excellent UV absorption is colorless, wherein the average concentration of titanium is 10-500 ppm, the concentration of OH group is 10-350 ppm.

Titanium-containing quartz glass having excellent UV absorption, and method for producing same

A quartz glass plate has a quartz glass plate body and a quartz glass member adhered to the quartz glass plate body through an adhesive layer, where the adhesive layer contains silica, and a sum of concentrations of Li, Na, and K ions, being alkali metal ions and Ca ions, being alkaline earth metal ions contained in the adhesive layer is 10 ppm by mass or less. Consequently, a step with a uniform thickness can be formed, and a quartz glass plate is not easily damaged by irradiation with a light containing an ultraviolet ray.

Quartz glass plate

A synthetic quartz glass optical member for an ultraviolet laser, where the quartz glass has a hydroxyl content of 10-100 ppm, a chlorine content of 200 ppm or less, a hydrogen content of 1.times.10.sup.16 molecules/cm.sup.3 or less, a homogeneity of refractive index of 5.times.10.sup.-6 or less in terms of .DELTA.n, and a birefringence of 5 nm/cm or less.

Optical member of synthetic quartz glass for excimer lasers and method

Growing community of inventors

Fukushima, Japan

Atsushi Shimada