Tdk Corporation

Hitachi-Kokusai Electric Inc.

Canon Kabushiki Kaisha

Kokusai Electric Corporation

Mitsubishi Hitachi Power Systems, Ltd.

Mitsubishi Heavy Industries Limited

Other

Renesas Electronics Corporation

L'air Liquide,societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude

Mitsubishi Power, Ltd.

Atsushi Sano

Yoshiro Hirose

Keitaro Otsuki

Tomohiko Kato

Yasuhiro Ikeda

Satoshi Shimamoto

Akiji Higuchi

Satoshi Maruyama

Katsuyoshi Harada

Hideharu Itatani

Masaki Sobu

Akinobu Nojima

Takeshi Takahashi

Yoshitomo Hashimoto

Sadayoshi Horii

Yugo Orihashi

Hidehiro Yanai

Hironori Tsukidate

Yosuke Miyaki

Hiroshi Ashihara

Tsukasa Kamakura

Tadashi Takasaki

Jun Nagatoshi

Tsuyoshi Iijima

Yasuyuki Kawanaka

Naonori Akae

Kazuyuki Okuda

Kiyohiko Maeda

Kenji Kameda

Masayuki Asai

Mitsuhiro Obara

Kazumasa Tanaka

Hidetoshi Kuroki

Kouji Tokita

Tadashi Suzuki

Masahiro Tsuchiya

Ryuji Yamamoto

Kimihiko Nakatani

Tetsushi Uneme

Kazuyuki Toyoda

Hisashi Suzuki

Keiichi Fukuda

Tatsuru Matsuoka

Tohru Inoue

Kazuya Ogawa

Hiroki Katayama

Hideaki Seki

Tsukasa Ohoka

Masato Kurihara

Taku Murotani

Chihiro Shirakawa

Mitsuro Tanabe

Tomohiko Hasegawa

Makoto Nishigaki

Nobuyuki Hosaka

Hiroshi Sato

Hirofumi Nakano

Yushin Takasawa

Takaaki Noda

Yosuke Ota

Masanobu Kanoto

Junya Azami

Hidetaro Murata

Masahiro Oishi

Nobuaki Kizuka

Kazutaka Yanagita

Hisanori Kobayashi

Katsuhiko Yamamoto

Yoshitake Kato

Masahito Kitamura

Toshinobu Miyakoshi

Hideyuki Miyamoto

Masayuki Tsuneda

Osamu Kasahara

Tetsuo Takaishi

Kunihiro Oga

Hiroyuki Miyabara

Yasutaka Naruge

Kenji Shima

Kazuya Kai

Katsuko Higashino

Tomoshi Nakamoto

Kenta Kotani

Yasuhiko Emori

Masahiro Yonebayashi

Masahiko Ijuin

Toshikazu Kobayashi

Takeshi Aso

Masaru Kadoshima

There is provided a technique that includes: a) supplying a first gas to the substrate on which a film is formed and forming a modified layer on a surface of the film; b) after a), supplying a second gas to the modified layer and removing the modified layer; c) after b), supplying an inert gas having a first temperature higher than a processing temperature of b) to the film; and d) removing a portion of the film by performing a), b), and c) sequentially a predetermined number of times.

Method of processing substrate, method of manufacturing semiconductor device, recording medium, and substrate processing apparatus

An optical scanning apparatus includes first and second light sources, a rotatable polygonal mirror, a motor, first and second mirrors, first and second lenses, and a casing. Within a mounting range, a top wall of an accommodating portion is provided with at least one projection projecting toward an opening of the accommodating portion. The projection extends from a first side wall to a second side wall of the accommodating portion. The top wall includes a recess formed opposite from the projection, and is free from a portion projecting toward the opening over a range from the first side wall to the second side wall, other than the projection in the mounting range. A free end portion of the projection is in a position remoter from the opening than a reflecting surface of the rotatable polygonal mirror is with respect to a rotational axis direction of the motor.

Optical scanning apparatus and image forming apparatus

There is provided a technique which includes: forming a first film containing silicon, oxygen, carbon and nitrogen on a substrate by performing a first cycle a predetermined number of times, the first cycle including non-simultaneously performing: forming a first layer containing silicon, oxygen, carbon and nitrogen by simultaneously supplying first aminosilane and an oxidant to the substrate; and performing a first modifying process to the first layer under a first temperature; and performing a second modifying process to the first film under a second temperature that is higher than the first temperature.

Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium

A gas turbine including a turbine driven by a combustion gas, a gas turbine casing that includes an exhaust casing having an inner tube and an outer tube, a bearing that rotatably supports a shaft of the turbine, a bearing casing that holds the bearing, a support leg that supports the gas turbine casing, struts that connect the inner tube and the outer tube, and a first support and a second support that support the bearing casing on the inner tube. The first support is located on a side same as the support leg relative to the struts in a flow direction of the combustion gas. The struts are located between the first support and the second support. The first support is fixed to the inner tube and the bearing casing. The second support is fixed to the inner tube and is in slidable contact with the bearing casing.

Gas turbine with reduced axial displacement under thermal expansion

An image forming apparatus to form a toner image on a recording material includes a photosensitive member and an optical scanning unit. The optical scanning unit includes an optical scanning unit, an optical box, a cover member, and a moving unit movable to an outside of the image forming apparatus. The optical scanning unit and the moving unit are arranged so that the moving unit and the optical scanning unit are opposed to each other when the moving unit is located in an inside of the image forming apparatus. The optical scanning unit is disposed so as to allow a user to touch the optical scanning unit through a space generated in the inside of the image forming apparatus when the moving unit is moved to the outside of the image forming apparatus. Between the optical box and the cover member, the cover member is opposed to the moving unit.

Image forming apparatus

An image forming apparatus includes an exposure unit provided with a rotatable polygon mirror including a plurality of reflecting surfaces for scanning a light beam emitted from a light source to expose a photosensitive member with the light beam according to image information. A determining unit determines an end of lifetime of the exposure unit based on a detecting result of density of a toner image detected by two detecting units at a first timing and a detecting result of density of the toner image detected by the two detecting units at a second timing after the first timing.

Image forming apparatus with detection of state of exposure unit

In a turbine designing and manufacturing method attendant on a material change of a rotor disk of a turbine rotor, a temperature rise time ratio is determined which is a desired ratio of a temperature rise time of the temperature of the rotor disk from a first temperature to a second temperature after the material change to the temperature rise time before the material change. An inter-surface distance between surfaces on upstream and downstream sides of the rotor disk after the material change is determined, and a shape of the rotor disk after the material change is determined based on the inter-surface distance. The turbine is designed based on the determined shape of the rotor disk. After the material change in the shape determined in the designing process, the rotor disk and the turbine are manufactured based on the result of the designing process.

Turbine designing and manufacturing method

Embodiments of the invention relate to a substrate processing apparatus. In one embodiment, a substrate processing apparatus includes a plurality of process units. The process unit includes a process chamber for processing a substrate, an exhaust conduit connected to the process chamber and an exhaust pump arranged in the path of the exhaust conduit. The substrate processing apparatus further includes a connecting conduit connected to the exhaust conduits of the process units in the upstream of the exhaust pump and a switching unit which switches an exhaust path of the process chamber to the other exhaust pump in the other process unit via the connecting conduit.

Substrate processing apparatus, non-transitory computer-readable recording medium thereof and semiconductor manufacturing method by employing thereof

There is provided a technique that includes forming a film containing silicon, oxygen, carbon, and nitrogen on a substrate by performing a cycle a predetermined number of times, the cycle including: forming a first layer containing silicon, carbon, and nitrogen by performing a set a predetermined number of times, the set including: supplying a first precursor, which contains at least two Si&#x2014;N bonds and at least one Si&#x2014;C bond in one molecule, to the substrate; and supplying a second precursor, which contains nitrogen and hydrogen, to the substrate; and forming a second layer by supplying an oxidant to the substrate, to thereby oxidize the first layer.

The spot diameter of a laser beam emitted from a first light source, passing through a first stop member, and focused on an object to be scanned is smaller than the spot diameter of a laser beam emitted from a second light source, passing through a second stop member, and focused on an object to be scanned. After the focal depth at the spot diameter of the laser beam emitted from the first light source, passing through the first stop member, and focused on the object to be scanned is adjusted by moving a first holding member holding the first light source at least in the emission direction of the laser beam from the light source, the first holding member and a housing member are bonded with an adhesive, and the first holding member is positioned and fixed to the housing member.

Scanning optical device

There is provided a method of forming a film with improved step coverage on a substrate by performing, a predetermined number of times, forming a first layer by supplying a halogen-free precursor having a first chemical bond cut by thermal energy at a first temperature and a second chemical bond cut by thermal energy at a second temperature lower than the first temperature and having a ratio of the number of first chemical bonds to the number of second chemical bonds in one molecule thereof, the ratio being equal to or more than 3, to the substrate at a temperature equal to or higher than the second temperature and lower than the first temperature.

An optical scanning apparatus includes an optical scanning unit which includes a first light source, a first rotatable polygonal mirror for reflecting the beam emitted from the first light source, a second light source, a second rotatable polygonal mirror for reflecting the beam emitted from the second light source; and a housing accommodating the polygonal mirrors. The housing includes only three fixed portions fixed to a fixing portion for fixing the optical scanning unit. The first rotatable polygonal mirror and the second rotatable polygonal mirror are disposed such that a rotational axis of the first rotatable polygonal mirror and a rotational axis of the second rotatable polygonal mirror are in a triangular area defined by lines connecting the three fixed portions, as viewed in a rotation axial direction of the first rotatable polygonal mirror.

A negative electrode active material with sufficiently high discharge capacity at a high rate, and a negative electrode and a lithium ion secondary battery using the negative electrode active material. A negative electrode active material according to the invention includes a negative electrode active material particle containing silicon and silicon oxide, wherein a surface layer part of the negative electrode active material particle is a layer with lower density than a core part of the negative electrode active material particle. With such a structure of the negative electrode active material, the sufficiently high discharge capacity at a high rate can be obtained.

Negative electrode active material, and negative electrode and lithium ion secondary battery using the negative electrode active material

Growing community of inventors

Tokyo, Japan

Atsushi Sano