Mitsubishi Electric Corporation

Mitsubishi Denki Kabushiki Kaisha

Other

Renesas Technology Corp.

Atsushi Narazaki

Kaoru Motonami

Shigeto Honda

Yusuke Fukada

Ryoichi Fujii

Akihiko Furukawa

Yasuhiro Kagawa

Kazuya Konishi

Tsuyoshi Kawakami

Kazunari Nakata

Ryu Kamibaba

Yoshiaki Hisamoto

Shoichi Orita

Hiroki Muraoka

Yuji Murakami

Tetsuo Takahashi

Kenji Suzuki

Katsumi Nakamura

Takuya Takahashi

Yoichiro Tarui

Shinya Soneda

Yutaka Fukui

Masayoshi Tarutani

Katsutoshi Sugawara

Kensuke Taguchi

Yasunori Yamashita

Kenji Hatori

Hitoshi Uemura

Kazuya Ishibashi

Tomoya Hirata

Shunsuke Sakamoto

Masashi Osaka

Hidetoshi Souno

Mariko Umeyama

Ayumu Onoyama

Yukio Matsushita

Katsumi Uryuu

Hisaaki Yoshida

Kazuaki Higashi

Included are a semiconductor substrate, an emitter electrode formed on the semiconductor substrate, a gate electrode formed on the semiconductor substrate, a source layer of a first conductivity type formed on the semiconductor substrate, a base layer of a second conductivity type formed on the semiconductor substrate, a collector electrode formed under the semiconductor substrate, a plurality of active trench gates formed on a top-surface side of the semiconductor substrate and connected to the gate electrode, and a plurality of dummy trench gates formed on the top-surface side of the semiconductor substrate and not connected to the gate electrode. First structures, each including three or more of the active trench gates arranged side by side, and second structures, each including three or more of the dummy trench gates arranged side by side, are alternately provided.

Semiconductor device

In the present application, a power semiconductor device includes a first-conductive-type first base region having a first principal surface and a second principal surface opposite to the first principal surface, a second-conductive-type second base region disposed on the first principal surface and at least three groove parts parallel to each other disposed from a surface of the second base region. The device further includes insulating films covering inner walls of the respective groove parts, conductive trench gates filled on the insulating films, a first-conductive-type emitter region disposed in the second base region, and a second-conductive-type collector region disposed on the second principal surface of the first base region. The trench gates embedded in the first groove part and the third groove part are electrically connected to the gate electrode, and the trench gate embedded in the second groove part is electrically connected to the emitter electrode.

Power semiconductor device

A drift layer contains first conductivity type impurities. A well region contains second conductivity type impurities. A source region is provided on the well region and contains the first conductivity type impurities. A well contact region is in contact with the well region, contains the second conductivity type impurities, and has an impurity concentration on the second surface higher than the impurity concentration on the second surface in the well region. A gate electrode is provided on a gate insulating film. A Schottky electrode is in contact with the drift layer. A source ohmic electrode is in contact with the source region. A resistor is in contact with the well contact region and has higher resistance per unit area than the source ohmic electrode.

Silicon carbide semiconductor device and power conversion apparatus

A gate trench and a protective trench are provided on a top surface of the silicon carbide semiconductor layer of a first conductivity type. A protective diffusion layer of a second conductivity type is provided at a position deeper than the gate electrode in the silicon carbide semiconductor layer. An inter-layer insulating film covers a surface of the gate electrode and includes a cell opening. A source electrode is electrically connected to the source region via the cell opening and electrically connected to the protective diffusion layer via the protective trench. A plated film is provided on the source electrode. A concave part is provided on a top surface of the source electrode above the protective trench. A depth in a vertical direction of the concave part is equal to or less than half of a width in a horizontal direction of the concave part.

Silicon carbide semiconductor device, manufacturing method therefor and power conversion apparatus

A semiconductor device includes a first semiconductor layer on one main surface of a semiconductor substrate; a plurality of trench gates in the first semiconductor layer extending to reach the inside of the semiconductor substrate; a second semiconductor layer selectively provided in an upper portion of the first semiconductor layer between the trench gates; an isolation layer in contact with a side surface of the second semiconductor layer and extends in the first semiconductor; and a third semiconductor layer in the upper portion of the first semiconductor layer between the trench gates and has at least one side surface in contact with the trench gate. The isolation layer is between and separates the second semiconductor layer and the third semiconductor layer from each other and is formed to extend to the same depth as, or to a position deeper than the second semiconductor layer.

Semiconductor device and method for manufacturing the same

A p-type base layer () is formed on a surface of an n-type silicon substrate (). First and second n-type buffer layers ()are formed on a back surface of the n-type silicon substrate (). The first n-type buffer layer () is formed by a plurality of implantations of protons at different accelerating voltages and has a plurality of peak concentrations with different depths from the back surface of the n-type silicon substrate (). The second n-type buffer layer () is formed by an implantation of a phosphorus. A position of a peak concentration of the phosphorus is shallower from the back surface of the n-type silicon substrate () than positions of peak concentrations of the protons. The peak concentration of the phosphorus is higher than the peak concentrations of the protons. A concentration of the protons is higher than a concentration of the phosphorus at the positions of the peak concentrations of the protons.

Semiconductor device and method of manufacturing the same

A semiconductor device of the present invention includes: an IGBT including an emitter layer on a first main surface side of a semiconductor substrate and a collector layer on a second main surface side of the semiconductor substrate; a freewheeling diode including an anode layer on the first main surface side of the semiconductor substrate and a cathode layer on the second main surface side of the semiconductor substrate; a well region that is located in a boundary between the IGBT and the freewheeling diode and separates the IGBT and the freewheeling diode; a first electrode located on the first main surface of the semiconductor substrate so as to be connected to the emitter layer, the anode layer, and the well region; a resistance element located between the well region and the first electrode.

In a semiconductor device according to the present invention, an electrode layer and a recessed part are formed on a surface of a semiconductor substrate. Further, in the semiconductor substrate, a RESURF layer that is in contact with a bottom surface of the recessed part and the electrode layer is formed. In addition, an insulating film is formed on an upper surface of the semiconductor substrate so as to fill the recessed part. Moreover, a field plate electrode is formed on the insulating film above the recessed part.

High breakdown voltage semiconductor device having a resurf layer

A semiconductor device includes a substrate of a first conductivity type, a first impurity region of a second conductivity type formed on a top surface side of the substrate, a second impurity region of the second conductivity type formed on the top surface side of the substrate and in contact with the first impurity region, the second impurity region laterally surrounding the first impurity region and having a greater depth than the first impurity region, as viewed in cross-section, and a breakdown voltage enhancing structure of the second conductivity type formed to laterally surround the second impurity region. A boundary between the first and second impurity regions has a maximum impurity concentration equal to or less than that of the second impurity region, and a current is applied between a top surface and a bottom surface of the substrate.

Semiconductor device having breakdown voltage enhancement structure

A semiconductor device includes a first conductive type semiconductor substrate, a second conductive type active region formed on a top surface side of the semiconductor substrate, a second conductive type inside VLD region formed to contact the active region on the top surface side in a plan view, and a second conductive type well region formed to contact a portion opposite to the portion contacting the active region of the inside VLD region on the top surface side in a plan view. The well region is formed to be deeper than the active region. The inside VLD region has the same depth as that of the active region in the portion contacting the active region, the depth gradually increasing from the active region toward the well region and becoming the same as the depth of the well region in the portion contacting the well region.

A semiconductor device includes a semiconductor chip with a gate electrode, and a stress detecting element placed on a surface of the semiconductor chip, and which detects stress applied to the surface. The semiconductor device controls a control signal to be applied to the gate electrode in response to stress detected by the stress detecting element. The stress detecting element is preferably provided as a first stress detecting element which detects stress applied to a central portion of the semiconductor chip in plan view. The stress detecting element is preferably provided as a second stress detecting element which detects stress applied to a circumferential portion of the semiconductor chip in plan view.

Semiconductor device and method of testing the same

A semiconductor device using one or more guard rings includes a p-type guard ring region surrounding a pn junction region, an insulating film covering the p-type guard ring region, one or more conductive films electrically connected with the p-type guard ring region through one or more contact holes made in the insulating film, and a semi-insulating film covering the insulating film and the conductive films. Thus, a desired breakdown voltage characteristic can be ensured even if a foreign matter or the like adheres to a surface of the conductive films.

A power semiconductor device of the present invention has an active region and an electric field reduction region and includes: an emitter region of a first conductivity type; a base region of a second conductivity type in contact with the emitter region; an electrical strength providing region of the first conductivity type in contact with the base region; a collector region of the second conductivity type in contact with the electrical strength providing region; and a collector electrode in contact with the collector region; wherein the collector region is disposed on both a active region and a electric field reduction region each containing a dopant of the second conductivity type, and the collector region disposed on the electric field reduction region includes a region having a lower density of carriers of the second conductivity type than the collector region disposed on the active region.

Power semiconductor device having an active region and an electric field reduction region

A semiconductor wafer has a main surface. A main chip region is formed on the main surface. A sub-chip region is smaller in area than the main chip region, and positioned on an edge side of the semiconductor wafer relative to the main chip region. The sub-chip region is identical to the main chip region in design pattern. Accordingly, a semiconductor device in which occurrence of a pattern failure at the edge of the wafer can be prevented when chips are arranged in the surface of the semiconductor wafer and a method of manufacturing the same can be obtained.

Growing community of inventors

Tokyo, Japan

Atsushi Narazaki