Nippon Mining & Metals Co., Ltd.

Tohoku University

Jx Nippon Mining Metals Corporation

Nikko Materials Company, Limited

Canon Kabushiki Kaisha

Matsushita Electric Industrial Co., Ltd.

Panasonic Corporation

Atsushi Nakamura

Masataka Yahagi

Toru Imori

Akihisa Inoue

Hisamichi Kimura

Shin-ichi Yamaura

Yasushi Narusawa

Takashi Ishida

Mamoru Shoji

Shigeru Furumiya

Hiromichi Ishibashi

Junichi Minamino

Shin-Ichi Yamaura

Koji Fukunaga

Kiyoshi Katano

Jiro Tateyama

Naohisa Suzuki

Hideyuki Takahashi

Makoto Kobayashi

Kenichiro Sasamori

Seiji Masuda

Yoshiro Yanai

A sputtering target for producing a metallic glass membrane characterized in comprising a structure obtained by sintering atomized powder having a composition of a ternary compound system or greater with at least one or more metal elements selected from Pd, Zr, Fe, Co, Cu and Ni as its main component (component of greatest atomic %), and being an average grain size of 50 &#x3bc;m or less. The prepared metallic glass membrane can be used as a substitute for conventional high-cost bulk metallic glass obtained by quenching of molten metal. This sputtering target for producing the metallic glass membrane is also free from problems such as defects in the metallic glass membrane and unevenness of composition, has a uniform structure, can be produced efficiently and at low cost, and does not generate many nodules or particles. Further provided is a method for manufacturing such a sputtering target for forming the metallic glass membrane.

Sputtering target for producing metallic glass membrane and manufacturing method thereof

A sintered sputtering target having a structure where the average crystallize size is 1 nm to 50 nm and preferably comprises an alloy having a three-component system or greater containing, as its primary component, at least one element selected from among Zr, Pd, Cu, Co, Fe, Ti, Mg, Sr, Y, Nb, Mo, Tc, Ru, Rh, Ag, Cd, In, Sn, Sb, Te and a rare earth metal. This target is manufactured by sintering atomized powder. Thereby provided is a high density target having an extremely fine and uniform structure manufactured with the sintering method, in place of a conventional bulk metal glass produced by the quenching of a molten metal, which has a coarse crystal structure and requires a high cost for its production.

Sputtering target and method for production thereof

Provided is a hydrogen separation membrane characterized by comprising a structure obtained by sintering atomized powder having a composition of NiMZr(wherein M is Nb and/or Ta, 25&#x2266;x&#x2266;40, 25&#x2266;y&#x2266;40) and an average grain size of 50 &#x3bc;m or less. The prepared hydrogen separation membrane does not require the use of costly Pd metal, and can be used as a substitute for conventional high-cost bulk metallic glass obtained by quenching of molten metal. This hydrogen separation membrane is free from problems such as defects in the hydrogen separation membrane and unevenness of composition, has a uniform structure, and is capable of separating hydrogen at low cost. Further provided are a sputtering target for forming such as hydrogen separation membrane and its manufacturing method.

Hydrogen separation membrane, sputtering target for forming said hydrogen separation membrane, and manufacturing method thereof

An iron-based sintered body with a rustproof function comprises a layer containing 0.01 to 5 at % of indium on the surface of the iron-based sintered body, or an iron-based sintered body with a rustproof function contains 0.01 to 5 at % of indium throughout the sintered body, and the iron-based sintered body having iron as its principal component is manufactured by performing sintering in a gas atmosphere containing indium vapor or indium. Thereby obtained is an iron-based sintered body, as well as the manufacturing method thereof, capable of easily improving the rustproof effect without having to hardly change the conventional process.

Iron-based sintered compact and method for production thereof

Provided is iron-based metal powder for powder metallurgy including a metallic soap containing at least one or more types selected from a group of Ag, Au, Bi, Co, Cu, Mo, Ni, Pd, Pt, Sn, Te and W having a higher standard oxidization potential than iron, and an iron sintered body having a rust prevention function, wherein at least one or more types of metallic soap selected from a group of Ag, Au, Bi, Co, Cu, Mo, Ni, Pd, Pt, Sn, Te and W having a higher standard oxidization potential than iron is added to iron-based metal powder for powder metallurgy, and sintering is performed thereto. As a result, obtained is mixed powder for powder metallurgy capable of improving the rust prevention effect easily without having to hardly change the conventional processes.

Metallic powder for powder metallurgy whose main component is iron and iron-based sintered body

Provided is iron-based metal powder for powder metallurgy including a metallic soap containing at least one or more types of metal selected from a group of Ag, Au, Bi, Co, Cu, Mo, Ni, Pd, Pt, Sn and Te having a higher standard oxidization potential than iron, and an additional metal which forms a liquid phase at a temperature of 1200&#xb0; C. or less in the combination with the metal, wherein the soap contains metal for forming an alloy phase between the two. As a result, obtained is mixed powder for powder metallurgy capable of improving the rust prevention effect easily without having to hardly change the conventional processes.

Provided is an iron-based sintered body with a rustproof function comprising a layer containing 0.01 to 5 at % of indium on the surface of the iron-based sintered body, or an iron-based sintered body with a rustproof function containing 0.01 to 5 at % of indium throughout the sintered body, and the iron-based sintered body having iron as its principal component is manufactured by performing sintering in a gas atmosphere containing indium vapor or indium. Thereby obtained is an iron-based sintered body, as well as the manufacturing method thereof, capable of easily improving the rustproof effect without having to hardly change the conventional process.

Provided is metallic powder for powder metallurgy having iron as its principal component and containing indium soap, or metallic powder for powder metallurgy further comprising at least one type selected among bismuth soap, nickel soap, cobalt soap, copper soap, manganese soap and aluminum soap in such indium soap. Thereby obtained is metallic powder for powder metallurgy capable of easily improving the rustproof effect without having to hardly change the conventional process.

Metal powder for powder metallurgy and iron-based sintered compact

A manufacturing method of ITO powder with tin dissolved in indium oxide, wherein the ITO powder is obtained by performing spray pyrolysis to a mixed solution or slurry of indium nitrate and tin chloride in which the concentration of indium and tin is 3.0 mol/L or more, thereby providing at low costs ITO powder superior in component dispersibility by dissolving tin in indium oxide as well as a precise target superior in uniformity. It is thereby possible to restrain the deterioration of quality or abnormal protrusions such as nodules in cases where the ITO sputtering target deposition is not uniform.

Manufacturing method of ito powder with tin dissolved in indium oxide, and manufacturing method of ito target

Growing community of inventors

Ibaraki, Japan

Atsushi Nakamura