Hitachi-High-Technologies Corporation

Hitachi, Ltd.

Kddi Corporation

Hitachi Medical Corporation

Nec Corporation

Mitsubishi Kagaku Iatron, Inc.

Sony Group Corporation

Nec Electronics Corporation

Hitachi High-Tech Corporation

Hitachi-Ge Nuclear Energy, Ltd.

Hitachi High-Technologies Corporaiton

Hitachi High-Technologies Corporatiopn

Atsushi Miyamoto

Hidetoshi Morokuma

Ryoichi Matsuoka

Wataru Nagatomo

Kenji Nakahira

Chie Shishido

Maki Tanaka

Toshifumi Honda

Takumichi Sutani

Takehiro Hirai

Hirohito Okuda

Yuji Takagi

Ryo Nakagaki

Minoru Harada

Takashi Hiroi

Kenji Obara

Naoki Hosoya

Yasuyuki Kudo

Akira Hamamatsu

Tetsuya Yamada

Hideyuki Kazumi

Yasutaka Toyoda

Takashi Doi

Akira Ito

Mitsuji Ikeda

Kazuki Yokoyama

Noriaki Arai

Fumihiro Sasajima

Tomoyuki Ootsuki

Tomofumi Nishiura

Go Kotaki

Masato Andou

Junichi Miyakoshi

Eiji Yamada

Masaharu Hattori

Tsuneo Okuyama

Tokio Sawai

Takeshi Matsuya

Takashi Saitou

Hirofumi Iizuka

Jie Bai

Taku Ninomiya

Hideaki Sasazawa

Norio Ohkubo

Tsuyoshi Minakawa

Yoshinobu Hoshino

Koji Aoyama

Fumihiko Fukunaga

Naoaki Kondo

Mayuka Osaki

Manabu Yano

Tadayuki Matsumura

Ryuji Mine

Katsumi Setoguchi

Mayuka Iwasaki

Atsushi Tomoda

Yuki Itotani

Shinya Murakami

Akihiro Onizawa

Masaki Hamamoto

Mitsutoshi Kobayashi

Maki Kimura

Toshikazu Kawahara

Hiroshi Honmura

Minoru Yoshida

The present invention includes image acquiring for acquiring an inspection image of a target object, pass/fail determining for determining whether the inspection image acquired in the image acquiring is the inspection image of a non-defect candidate or the inspection image of a defect candidate, overdetection determining for determining whether the inspection image determined as a defect candidate in the pass/fail determining is the inspection image of overdetection or the inspection image of non-overdetection which is not overdetection, non-defect estimation parameter learning for learning a non-defect estimation parameter used in the pass/fail determining using a learning non-defect image acquired in the image acquiring, and overdetection determination parameter learning for learning an overdetection determination parameter used in the overdetection determining using the learning non-defect image.

Computer and visual inspection method for identifying defective products

Provided is a method for adjusting a field-of-view of a charged particle microscope device, in which reference data for a sample is set, a plurality of regions of interest are set for the reference data, a rough sampling coordinate group is set for each of the plurality of regions of interest, the sample is irradiated with charged particles based on the sampling coordinate group to obtain a corresponding pixel value group, a plurality of reconstructed images corresponding to the plurality of regions of interest are generated based on the pixel value group, a correspondence relationship among the plurality of regions of interest is estimated based on the plurality of reconstructed images, and the plurality of regions of interest are adjusted based on the correspondence relationship. Here, the sampling coordinate group is set based on the reference data.

Charged particle microscope device and method for adjusting field-of-view thereof

A communication terminal that transmits device data output by a communication device via a wireless communication circuit. The communication terminal includes at least one memory configured to store instructions, and at least one processor configured to execute the instructions. The instructions include receiving the device data output by the communication device, storing the received device data into the at least one memory, and transmitting, to the wireless communication circuit, the stored device data after the device data is stored in the at least one memory until a prescribed amount, which is set in association with at least either the communication device outputting the device data or an attribute of the device data, has been reached.

Communication terminal and communication method for transmitting device data

Provided is a control device including a control unit that calculates a first positional relationship between an eye of an observer observing an object displayed on a display unit and a first point in a master-side three-dimensional coordinate system, and controls an imaging unit that images the object so that a second positional relationship between the imaging unit and a second point corresponding to the first point in a slave-side three-dimensional coordinate system corresponds to the first positional relationship.

Control device and master slave system

A data management apparatus manages a plurality of data items output by a plurality of communication devices that output data. The data management apparatus includes at least one memory configured to store instructions, and at least one processor configured to execute the instructions. The instructions, when executed by the at least one processor, include receiving a data acquisition request, including an application identification of an application from the data acquisition apparatus, extracting data output by the application on a communication device corresponding to the application identification included in the data acquisition request, among the plurality of data items received from the plurality of communication devices via a relay apparatus, and transmitting the extracted data to the data acquisition apparatus.

Data management apparatus, data management method, and data communication system

The present invention provides a data management apparatus for managing a plurality of data items output by a plurality of communication devices that output data. The data management apparatus includes a storage section configured to store device identification information of each of the plurality of communication devices in association with charge identification information including either contractor identification information of a contractor of a contract for using a relay apparatus that is configured to transfer the plurality of data items to the data management apparatus or acquirer identification information of a data acquirer who acquires the data from the data management apparatus, and a charge amount determination section configured to determine a charge amount for each item of the charge identification information on the basis of data communication traffic volumes corresponding to data output from the communication devices of one or more device identification information items stored in association with the charge identification information.

Management device, communication terminal, and method for communication terminal

An automatic program generation system that includes: an input unit that receives inputs of input data, target data, and design requirements for a first program to be generated; a program storage unit that stores a plurality of existing second programs; a program generation device that generates the first program; and an output unit that outputs the first program. The program generation device includes a program analysis unit that analyzes the plurality of second programs to generate a program model, a basic node/constraint generation unit that generates basic nodes and constraints for evolutionary computation based on the generated program model and the design requirements input from the input unit, and an optimization unit that generates the first program by the evolutionary computation based on the basic nodes and the constraints and the input data and the target data input from the input unit.

Automatic program generation system and automatic program generation method

A computer utilizes correlation matrix data including a value indicating correlation between indicators and comprises a graph process unit that includes a control factor calculation unit configured to calculate a control factor for generating compressed graph data based on a constraint condition on a process; and a graph generation unit configured to generate graph data from the correlation matrix data by using the control factor. The control factor calculation unit obtains a target process time as the constraint condition; calculates a maximum of a number of edges to be included in the graph data; calculates a threshold for extracting the elements converted from the correlation matrix data to the graph data based on the maximum of the number of edges; and outputs the threshold as the control factor. The graph generation unit extracts the elements from the correlation matrix data based on the threshold, and generates the graph data.

Computer and graph data generation method

An pattern evaluation method includes a step of estimating imaging deviation allowed to evaluate an overlay position on one or more evaluation point candidates based on pattern layout information, a step of deciding one or more evaluation points from among the evaluation point candidates based on the allowed imaging deviation, a step of deciding an imaging sequence for imaging the selected evaluation point, and a step of evaluating an overlay position between first and second patterns based on an image obtained by imaging the evaluation point according to the imaging sequence.

Pattern evaluation method and pattern evaluation device

A specimen image capture method using a charged particle microscope device includes: a first image acquisition step in which the gain of a detector in a charged particle microscope is set to a first gain value, charged particle beam scanning is carried out on a specimen, and a first image is obtained; a second image acquisition step in which the gain of the detector is set to a second gain value, which is different to the first gain value, charged particle beam scanning is carried out on the specimen, and a second image is obtained; and an image combination step in which the first gain value and the second gain value are used and the first image and the second image are combined.

Charged particle microscope device and image capturing method

In order to acquire high resolution ultrasound images while maintaining an appropriate frame rate in ultrasound diagnostic devices, the disclosed method generates high resolution ultrasound images by performing image reconstruction on the basis of multiple ultrasound frame images captured along a time series and the magnitudes of positional shifts, or forms high resolution ultrasound images by performing image reconstruction on the basis of multiple ultrasound frame images acquired by controlling the ultrasound probe and varying scan orientation or scan focal length frame by frame.

Ultrasound diagnostic device and method of generating an intermediary image of ultrasound image

A model based measurement method is capable of estimating a cross-sectional shape by matching various pre-created cross-sectional shapes with a library of SEM signal waveforms. The present invention provides a function for determining whether or not it is appropriate to create a model of a cross-sectional shape or a function for verifying the accuracy of estimation results to a conventional model based measurement method, wherein a solution space (expected solution space) is obtained by matching library waveforms and is displayed before measuring the real pattern by means of model based measurement. Moreover, after the real pattern is measured by means of model based measurement, the solution space (real solution space) is obtained by matching the real waveforms with the library waveforms and is displayed.

Shape measurement method, and system therefor

A high-performance image quality improvement process, capable of improving the image quality of low-definition areas (lower layer patterns in a multilayer, bottoms of holes in a hole pattern, etc.), is performed to a captured image. Definition enhancement intensity is calculated using height information included in design data or estimate values of sample height information calculated from the captured image, and the image quality improvement process is performed to the captured image using the definition enhancement intensity.

Charged-particle microscope device and method for inspecting sample using same

In a panoramic image construction technology a wide-range imaging area (EP) of semiconductor patterns is divided into a plurality of imaging areas (SEP), and joined a group of images, which are obtained by imaging the SEPs using an SEM, through image processing. Although a pattern serving as a key to joining is not contained in an overlap area between some of the SEPs, all the images can be joined in some cases is noted so that: although the number of patterns serving as keys to joining is small, SEPs whose images are all joined can be determined; or even if such SEPs cannot be determined, SEPs satisfying user's request items as many as possible can be determined. The cases are extracted by optimizing an SEP arrangement, whereby the number of cases in which SEPs whose images are all joined can be determined is increased.

Scanning electron microscope device and pattern dimension measuring method using same

Growing community of inventors

Yokohama, Japan

Atsushi Miyamoto