Seiko Epson Corporation

Atsushi Matsuo

Ryuta Nishizawa

Shinya Aoki

Keiichi Yamaguchi

Masashi Shimura

Shiro Murakami

Byonhaku Yu

Akira Uematsu

Keiji Nakagawa

Yoshiyuki Terashima

Yoichi Sato

Fumio Ichikawa

Takayuki Kikuchi

Tsukasa Kosuda

Toshihiro Il

Shigeru Shiraishi

Yohei Yamada

Taku Matsunaga

Masaya Kanno

Takatoshi Sugiyama

A method of manufacturing a quartz crystal element includes preparing a quartz crystal wafer having a predetermined cutting angle with respect to a crystal axis of a quartz crystal, forming a first resist film having a first tilted part on a first surface of the quartz crystal wafer and dry-etching the first resist film with the quartz crystal, forming a first tilted surface by dry-etching the quartz crystal wafer from the first surface side, forming a second resist film having a second tilted part on a second surface of the quartz crystal wafer and dry-etching the second resist film with the quartz crystal, and forming a second tilted surface tilted by dry-etching the quartz crystal wafer from the second surface side. The quartz crystal element provided with the first tilted surface and the second tilted surface, and having a cutting angle different from the predetermined cutting angle is formed.

Method of manufacturing quartz crystal element

A vibration device includes a quartz substrate including a first vibration section, a second vibration section, and a third vibration section, a pair of first excitation electrodes formed at two principal surfaces of the quartz substrate, a pair of second excitation electrodes so formed as to sandwich the second vibration section in the thickness direction of the quartz substrate, and a pair of third excitation electrodes so formed as to sandwich the third vibration section in the thickness direction of the quartz substrate. At least one of the pair of second excitation electrodes is formed at a first inclining surface that inclines with respect to the two principal surfaces. At least one of the pair of third excitation electrodes is formed at a second inclining surface that inclines with respect to the two principal surfaces. The second inclining surface inclines with respect to the first inclining surface.

Vibration device and oscillator

The vibrator device includes a vibrator element, a relay substrate, a base, an element-side bonding member for bonding the vibrator element and the relay substrate to each other, and a base-side bonding member for bonding the base and the relay substrate to each other. Further, the element-side bonding member has a first bonding member and s second bonding member arranged side by side along an A axis. Further, an X axis of a first quartz crystal substrate provided to the vibrator element is parallel to the A axis, and a second quartz crystal substrate provided to the relay substrate is a Z-cut quartz crystal substrate.

Vibrator device and vibrator module

A vibrator includes: a vibration element that includes a pair of first excitation electrodes formed at the first vibration portion, a pair of second excitation electrodes formed at the second vibration portion, and a pair of third excitation electrodes formed at the third vibration portion, in which one second excitation electrode of the pair of second excitation electrodes is formed at a first inclined surface that is inclined with respect to two main surfaces, and one third excitation electrode of the pair of third excitation electrodes is formed at a second inclined surface that is inclined with respect to the two main surfaces and the first inclined surface; and a package that houses the vibration element. The vibration element includes a fixing portion to be fixed to the package. The fixing portion is provided between the first vibration portion and the second and third vibration portions.

Vibrator and oscillator

A resonator device includes a quartz crystal substrate, a resonator element including a first excitation electrode arranged on a first surface of the quartz crystal substrate, a second excitation electrode arranged on a second surface of the quartz crystal substrate in opposition to the first excitation electrode, and first and second pad electrodes that are arranged on the first surface and are coupled to the first and second excitation electrodes, a base including a substrate and first and second interconnects arranged on the substrate, a first bonding member bonding the first pad electrode to the first interconnect, and a second bonding member bonding the second pad electrode to the second interconnect. The first and second bonding members are arranged such that a first imaginary line that passes through a centroid of the resonator element and is parallel to an X axis is interposed between the first and second bonding members. An angle &#x3b8;1 formed between the first imaginary line and a second imaginary line passing through the first bonding member and the second bonding member is 100&#xb0;&#x3c;&#x3b8;1&#x3c;140&#xb0;.

Resonator device, resonator module, electronic apparatus, and vehicle

A resonator element includes a quartz crystal substrate including a supporting section, a resonating section, and a coupling section coupling the supporting section and the resonating section and having thickness smaller than the thickness of the supporting section, the supporting section including a first principal plane and a first side surface coupling the first principal plane and the coupling section, a first excitation electrode disposed in the resonating section, a second excitation electrode disposed in the resonating section and overlapping the first excitation electrode via the resonating section, and first and second pad electrodes including portions disposed on the first principal plane, the first and second pad electrodes being electrically coupled to the first and second excitation electrodes.

Resonator element, resonator device, oscillator, electronic device, and vehicle

A vibrator device includes a base; and a vibrator element including a quartz crystal vibrator element attached to the base via a first metal bump, in which the first metal bump is disposed on a straight line inclined within a range of +55&#xb0; to +65&#xb0; or &#x2212;65&#xb0; to &#x2212;55&#xb0; with respect to an X axis of the quartz crystal constituting the quartz crystal vibrator element in plan view seen from a direction in which the base and the quartz crystal vibrator element are arranged.

Vibrator device, electronic apparatus, and vehicle

A vibration element includes: a quartz crystal substrate having a first vibration part and a second vibration part; a pair of first excitation electrodes formed at two main surfaces of the quartz crystal substrate, at the first vibration part; and a pair of second excitation electrodes formed in such a way as to sandwich the second vibration part in a direction of thickness of the quartz crystal substrate, at the second vibration part. At least one second excitation electrode of the pair of second excitation electrodes is formed at an inclined surface inclined to at least one of the two main surfaces.

Vibration element and oscillator

A vibrator device includes abase, a circuit element that is attached to the base, and a vibrator element that is arranged at an active surface of the circuit element and is attached to the circuit element, and the circuit element includes a terminal for frequency adjustment that is used for frequency adjustment of the vibrator element and is disposed in a region that does not overlap the vibrator element when viewed in a plan view of the active surface.

Vibrator device, method of manufacturing vibrator device, electronic apparatus, and vehicle

A resonator element includes a quartz crystal substrate including a first surface along an X axis which is an electrical axis, a second surface along the X axis, and a side surface, a first excitation electrode, a second excitation electrode, a first coupling electrode, a second coupling electrode, a first extraction electrode that couples the first excitation electrode and the first coupling electrode, and a second extraction electrode that couples the second excitation electrode and the second coupling electrode. In plan view, a virtual extension region is obtained by extending the first excitation electrode along the X axis.

Resonator element, resonator device, electronic apparatus, and vehicle

A vibrator element includes a substrate that performs thickness-shear vibration, wherein an outer shape of the substrate in a plan view has a first side and a second side arranged in a first direction along a direction of the thickness-shear vibration and extending along a second direction crossing the first direction, a third side and a fourth side arranged in the second direction and extending in the first direction, a first connecting portion connecting the first side and the third side, and a second connecting portion connecting the first side and the fourth side, the first connecting portion and the second connecting portion are located inside of a region surrounded by the first side, the second side, the third side, the fourth side, and extension lines of these sides in the plan view, and the substrate has broken-off portions projecting from the first connecting portion and the second connecting portion.

Vibrator element, vibrator, oscillator, electronic apparatus, and vehicle

A light receiving element includes a silicon substrate, a photodiode, an amplifier circuit adapted to amplify an output signal from the photodiode, and a light blocking section adapted to cover at least a part of the amplifier circuit to block light, and the photodiode, the amplifier circuit and the light blocking section are provided to the silicon substrate.

Light receiving element having light blocking section covering at least part of amplifier circuit, light receiving module , photoelectric sensor and biological information measurement

A vibrator device includes a base, a relay substrate that is supported by the base, and a vibrator element that is supported by the relay substrate. In addition, the vibrator element includes a vibration substrate formed of a piezoelectric single-crystalline body and an excitation electrode disposed on the vibration substrate. In addition, the relay substrate includes a substrate formed of the piezoelectric single-crystalline body. A crystal axis of the substrate and a crystal axis of the vibration substrate are shifted from each other.

A vibrator device includes a base, a first relay substrate mounted on the base, a second relay substrate mounted on the first relay substrate, and a vibrator element mounted on the second relay substrate, in which the second relay substrate is disposed between the first relay substrate and the vibrator, and the second relay substrate includes a terminal that is electrically coupled to the vibrator element and is positioned in a region overlapping with the first relay substrate and not overlapping the vibrator element in a plan view. The vibrator device being configured to reduce a mounting stress applied to a vibrator element and to reduce frequency variation of the vibrator element due to the mounting stress, in a case of mounting on a package after adjusting a frequency of the vibrator element.

Growing community of inventors

Shiojiri, Japan

Atsushi Matsuo