Tosoh Corporation

Sagami Chemical Research Institute

Atsushi Maniwa

Toshiki Yamamoto

Kohei Iwanaga

Hirokazu Chiba

Noriaki Oshima

Ken-ichi Tada

Kazuhisa Kawano

Taishi Furukawa

Hiroyuki Oike

Tadahiro Yotsuya

Kenichi Tada

The present invention is to provide a ruthenium complex represented by formula (1a), (2), (3), etc., which is useful for producing a ruthenium-containing thin film both under the conditions using an oxidizing gas as the reaction gas and under the conditions using a reducing gas as the reaction gas: wherein Rto R, R, Rand Rto Rrepresents an alkyl group having a carbon number of 1 to 6, etc., and n represents an integer of 0 to 2.

Ruthenium complex, method for producing same, and method for producing ruthenium-containing thin film

This invention aims at providing a material from which a silicon-containing thin film can be efficiently produced at a low temperature of 500&#xb0; C. or less without using plasma or the like. The invention relates to produce a hydrosilane derivative represented by the general formula (1') by reacting a chlorosilane derivative (3) with a compound MZ (4) and produce the silicon-containing thin film by using the hydrosilane derivative as the material.  In the formulae, R, Rare defined in the specification.

Hydrosilane derivative, method for producing same, and method for producing silicon-containing thin film

A subject for the invention is to provide novel titanium complexes which have a high vapor pressure and high thermal stability and serve as an excellent material for producing a titanium-containing thin film by a technique such as the CVD method or ALD method and to further provide processes for producing these complexes, titanium-containing thin films produced from the complexes, and a process for producing the thin films. The invention relates to producing a titanium complex represented by general formula (1): (wherein Rand Reach independently represent an alkyl group having 1-16 carbon atoms; Rand Reach independently represent a hydrogen atom or an alkyl group having 1-3 carbon atoms; and Rrepresents an alkyl group which has 1-16 carbon atoms and may have been substituted with one or more fluorine atoms) and to producing a titanium-containing thin film using the complex.

Titanium complex, processes for producing the same, titanium-containing thin film, and process for producing the same

For forming a thin ruthenium film of good quality by CVD method, it is necessary to form the thin film at low temperature. There hence is a desire for a ruthenium compound having a high reactivity to heat. This invention relates to a method of producing a ruthenium-containing film by CVD or the like using, as a raw material, a ruthenium complex mixture containing (2,4-dimethylpentadienyl)(ethyl-cyclopentadienyl)ruthenium and bis(2,4-dimethylpentadienyl)ruthenium, the amount of the latter compound being 0.1 to 100% by weight based on the weight of (2,4-dimethylpentadienyl)(ethylcyclopentadienyl)ruthenium, and the like.

Ruthenium complex mixture, method of producing the same, composition for film formation, ruthenium-containing film, and method of producing the same

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Kanagawa, Japan

Atsushi Maniwa