Saki Corporation

Atsushi Kitabatake

Yosuke Yamamoto

Hiroyuki Murata

Yuichiro Yoshida

In an inspection device having a storage unit and an exposure dose calculation unit, the exposure dose calculation unit executes a first step for calculating the dose when an image is acquired by irradiating radiation from a radiation generator based on the reference dose stored in the storage unit, a second step for calculating the dose when the relative position between the radiation generator and an inspection object is changed, a third step for calculating the total value of the dose irradiated to the inspection object, and a fourth step for outputting the total value.

Inspection device

To provide an inspection device capable of imaging a transmission image while changing relative positions of a radiation source, an inspection object, and a detector. An inspection device comprises a radiation generator, a substrate holding unit for holding an inspection object, a detector, a substrate holding unit driving unit and a detector driving unit, a substrate position detection unit and a detector position detection unit, and a control unit, wherein the control unit executes a step for causing the detector to start acquiring an image while the relative positions of the radiation generator, the substrate holding unit and the detector are changing, a step for acquiring information relating to the positions of the substrate holding unit and the detector when the detector starts acquiring an image, and a step for storing the image acquired by the detector and the information relating to the position in association with each other.

Growing community of inventors

Tokyo, Japan

Atsushi Kitabatake