Canon Kabushiki Kaisha

Oki Electric Industry Co., Ltd.

Oki Semiconductor Co., Ltd.

Atsushi Kimura

Hiroyuki Seki

Yoshifumi Nishimoto

Shinji Yamamoto

Takashi Maeno

Yugo Shibata

Yutaka Maruyama

Takao Mori

Hideki Tanaka

Tosiya Asano

Toshiaki Harada

Yoshitaka Okamura

Kei Suefuji

Hiroshi Sato

Tatsuo Furuta

Akira Shimada

Kenichi Kataoka

Masahiko Igaki

Hidenori Tanaka

Miki Ueda

Shinya Koyama

Eiichi Yanagi

Akira Uebayashi

Kaoru Miura

Harushige Yamamoto

Philip D Schumaker

Satoshi Fujita

Kazushi Suzuki

Xiaoming Lu

Seiji Inada

Satoshi Tsuchiya

Tomomi Funayoshi

Kazuhiko Aono

Jun Ota

Wei Zhang

Hiromitsu Miyamoto

Naruto Sugimoto

Mineo Soga

Tatsushi Hashimoto

Hiroshi Seki

The present invention provides a mold including a pattern to be transferred to an imprint material on a substrate using an imprint apparatus, the mold including: a pattern region in which the pattern is arranged; and a peripheral region surrounding the pattern region and configured to shield light, wherein the pattern region includes a first portion, which is arranged with a mark used to measure a relative position with respect to a substrate mark provided on the substrate and through which an image of the substrate mark passes, and a second portion through which an image of a stage mark provided on a stage holding the substrate passes.

Mold, imprint apparatus, and method of manufacturing article

A vibratory actuator includes a vibration member, a contact member, and a pressure member. The vibration member includes an elastic member, having protrusions. The contact member is in contact with the elastic member and moves in a direction relative to the vibration member. The pressure member pressurizes the vibration member and the contact member. Each of the protrusions includes a first contact surface in contact with the contact member. The contact member has a second contact surface made of metal sintered material and in contact with the vibration member. A ratio of a maximum amount of depression on the second contact surface in the direction of pressurization by the pressure member to a width of the first contact surface in a direction perpendicular to the direction of movement of the contact member relative to the vibration member and the direction of pressurization by the pressure member is 0.05% or less.

Vibratory actuator and method for manufacturing the same

An imprint method for forming a pattern of an imprint material on a substrate includes irradiating the imprint material with light to increase a viscosity of the imprint material on the substrate with a mold and the imprint material being in contact with each other, aligning the substrate and the mold with each other while changing and increasing a control gain to be used in a controller, which is configured to control relative positions of the mold and the substrate so as to reduce a displacement based on a result of detection of the displacement between the substrate and the mold, in such a manner that the control gain increases with the mold and the imprint material being in contact with each other, and curing the imprint material by irradiating the imprint material with light.

Imprint apparatus, imprint method, and method for manufacturing product

A vibration type actuator including vibrating elements and a contact element that is brought into contact with each other in a first direction. The vibration of the vibrating elements includes vibration in a first vibration mode in the first direction and vibration in a second vibration mode in a second direction intersecting the first direction. In the vibrating elements, a minimum value of a resonance frequency in the second vibration mode is greater than or equal to a maximum value of a resonance frequency in the first vibration mode, and a ratio of a difference between the maximum value and the minimum value of the resonance frequency in the second vibration mode to the minimum value of the resonance frequency in the second mode is less than or equal to a predetermined value.

Vibration type actuator and manufacturing method of vibration type actuator

An oscillation actuator of the present disclosure includes an oscillation body, a contact body configured to be in contact with the oscillation body, a holding member configured to hold the oscillation body, the holding member having a through hole, a pressing member configured to press the oscillation body through the through hole, and an oscillation damping member configured to be in contact with the holding member and the pressing member between the holding member and the pressing member.

Oscillation actuator and electronic device having oscillation actuator

A molding apparatus that molds a composition on a substrate with a mold includes a mold holding unit configured to hold the mold, a substrate holding unit configured to hold the substrate, a first elastic member configured to apply a first elastic force to the mold holding unit in a direction away from the substrate holding unit, and a control unit configured to cause the mold holding unit to move in the direction away from the substrate holding unit in a case where the control unit determines that an abnormality has occurred.

Molding apparatus for molding composition on substrate with mold, and article manufacturing method

The present invention provides an imprint apparatus which forms a pattern of an imprint material on a substrate by using a mold, the apparatus comprising: a driver configured to drive the mold and the substrate relatively; a measurement device configured to measure a relative position between the mold and the substrate; and a controller configured to, in alignment between the mold and the substrate, control the driver based on a signal obtained by combining, with a first signal according to a deviation between the relative position measured by the measurement device and a target relative position, second signals with time intervals therebetween and that momentarily increase a driving force of the driver.

Imprint apparatus, imprint method, and method of manufacturing article

An image forming apparatus includes a photosensitive member, an intermediary transfer member, a transfer portion, a cleaning portion, and an air blowing portion. The air blowing portion blows the air toward an outer peripheral surface of the intermediary transfer member in a moving direction of the intermediary transfer member away from the transfer portion, at a position between the transfer portion and the cleaning portion with respect to a movement direction of the intermediary transfer member.

Image forming apparatus

A method of manufacturing a vibration type actuator providing a satisfactory actuator performance even when an increase in speed is achieved and having a contact spring. The actuator includes an elastic member and a hollow protrusion having a side wall portion protruding with respect to a surface of the elastic member, a contact portion configured to come into contact with a body, and a first connection portion connecting the side wall portion and the contact portion, the method includes, forming the hollow protrusion including the side wall portion and a distal end portion by performing drawing on an elastic plate and forming the contact portion and the first connection portion by performing drawing or squeezing on the distal end portion, wherein the contact portion is surrounded by the first connection portion.

Vibrator manufacturing method

An ultrasonic motor includes an annular vibrator and an annular moving member that is brought into pressure-contact with the vibrator. The vibrator includes an annular vibrating plate and an annular piezoelectric element. The piezoelectric element includes an annular lead-free piezoelectric ceramic piece, a common electrode arranged on one surface of the piezoelectric ceramic piece, and a plurality of electrodes arranged on the other surface of the piezoelectric ceramic piece. The plurality of electrodes include two drive phase electrodes, one or more non-drive phase electrodes, and one or more detection phase electrodes. A second surface of the vibrating plate includes a plurality of groove regions extending radially, and the depths of the groove regions change in a circumferential direction along a curve obtained by superimposing one or more sine waves on one another. The ultrasonic motor exhibits a sufficient drive speed while suppressing generation of an unnecessary vibration wave.

Ultrasonic motor, drive control system, optical apparatus, and vibrator

A vibration-type actuator that is capable of reducing an unnecessary vibration during driving includes a vibration body configured by connecting an electro-mechanical energy conversion element and an elastic body. A driven body is in pressure contact with the vibration body. A controller moves the vibration body and the driven body relatively by a vibration that is excited in the vibration body by applying driving voltage to the electro-mechanical energy conversion element so that a difference between a resonance frequency in a natural vibration mode of the vibration body that is higher than an upper limit frequency of a predetermined driving frequency range and that is nearest to the upper limit frequency and a frequency of the driving voltage is greater than a difference between a resonance frequency in a natural vibration mode used for moving the vibration body and the driven body relatively and the frequency of the driving voltage.

Vibration-type actuator, driving method for vibration-type actuator, and electronic apparatus equipped with vibration-type actuator

The present invention provides an imprint apparatus which molds an imprint material on a shot region formed on a substrate by using a mold including a pattern surface on which a pattern is formed, comprising a holding unit configured to change a position and orientation of the mold, and a control unit configured to cause the holding unit to incline the mold, and bring the mold and the imprint material into contact with each other while the mold is inclined, wherein after the control unit obtains a shift amount by which a mark on the mold shifts by inclining the mold, and changes relative positions of the mold and the substrate according to the shift amount, the control unit brings the mold and the imprint material into contact with each other.

Imprint apparatus and method of manufacturing article

A vibration actuator includes a vibrator including an electromechanical transducer and an elastic body, a vibrator fixing member configured to hold the vibrator, a driven member configured to come into frictional contact with the vibrator so as to move relative to the vibrator, a pressing portion configured to press the vibrator against the driven member, a guide portion configured to guide the vibrator in a direction in which the vibrator moves, and a vibration damping member disposed between the vibrator fixing member and the movable plate. The guide portion includes a movable plate configured to move integrally with the vibrator, a rolling member configured to roll in the direction in which the vibrator moves, and a press-and-hold member configured to press the rolling member against the movable plate.

Vibration actuator

A rotary type vibration wave driving apparatus which is capable of reducing local wear of a contacting member and of reducing performance deterioration due to long term operation is provided. The apparatus includes a electro-mechanical energy conversion element, an vibration member fixed to the electro-mechanical energy conversion element and vibrated by a voltage being supplied to the electro-mechanical energy conversion element, and a moving member being brought into contact with the vibration member and frictionally driven by the vibration, and is configured such that the moving member includes a supporting portion extended from the main body portion of the moving member, and a contacting portion extended from the supporting portion and being brought into contact with the vibration member, and such that each of the supporting portion and the contacting portion is configured to be elastically deformable in the rotation axis direction of the moving member.

Rotary type vibration wave driving apparatus

A vibration type actuator providing a satisfactory actuator performance even when an increase in speed is achieved and having a contact spring. The actuator includes a vibrator equipped with an electrical-mechanical energy conversion element, an elastic member to which the electrical-mechanical energy conversion element is fixed, and a protrusion provided on the elastic member. The vibrator can generate an elliptic movement in the protrusion. A driven body is configured to come into contact with the protrusion and to make a relative movement with respect to the vibrator. The protrusion includes a contact portion having a contact surface contacting the driven body, a continuous side wall portion protruding with respect to one end surface of the elastic member and forming a hollow structure, and a connection portion connecting the contact portion and the side wall portion and exhibiting flexibility in a direction normal to the contact surface.

Growing community of inventors

Funabashi, Japan

Atsushi Kimura