Hamamatsu-photonics K.k.

Other

Tokyo Electron Limited

Atsushi Ishii

Tutomu Inazuru

Akihito Kobayashi

Ryosuke Yabushita

Ginji Sugiura

Katsuya Okumura

Motohiro Suyama

Naonobu Suzuki

Katsuji Kadosawa

Tomofumi Kiyomoto

An X-ray module includes; a housing; an electron gun that emits an electron beam inside the housing; a target disposed inside the housing and fixed to the housing, to generate an X-ray when the electron beam is incident on the target; a permanent magnet that is disposed outside the housing and deflects the electron beam by means of a magnetic force; and a heat radiating unit having a higher thermal conductivity than a thermal conductivity of the permanent magnet and thermally connected to the permanent magnet.

X-ray module

An X-ray tube includes an electron gun unit, a target that generates X-rays, and a vacuum housing unit. The vacuum housing unit has a metal housing unit for supporting the target and a bulb unit formed of an insulating material and connected to the metal housing unit. The electron gun unit has a focusing electrode portion at an end portion on an emission side of the electrons, the focusing electrode portion having a tubular shape for focusing the emitted electrons. In the electron gun unit, at least a part of the focusing electrode portion is supported by the bulb unit so as to be located in the metal housing unit. When viewed from an X-ray generation position on the target, the focusing electrode portion blocks a line of sight from the X-ray generation position to the bulb unit.

X-ray tube

An X-ray module includes a housing in which an opening portion is formed; an electron gun that emits an electron beam; a target that transmits an X-ray generated when the electron beam is incident on the target and emits the X-ray from an X-ray-emitting surface; an X-ray-emitting window that seals the opening portion, and that transmits the X-ray and emits the X-ray to a first side in an axial direction; and a heat radiating unit disposed outside the housing. The housing includes a surface on which a protrusion protruding to the first side is formed, the opening portion is formed in the protrusion, and the target is disposed in the opening portion. The heat radiating unit includes a first portion extending along the surface and thermally connected to the surface, and a second portion extending from the first portion to a second side opposite the first side.

An X-ray module includes a housing; an electron gun that emits an electron beam inside the housing; a target disposed inside the housing and fixed to the housing, to generate an X-ray when the electron beam is incident on the target; and a deflection unit including a permanent magnet and disposed outside the housing, to deflect the electron beam by means of a magnetic force of the permanent magnet. The deflection unit includes a heat insulating member disposed at least between the permanent magnet and the housing. A thermal conductivity of the heat insulating member is lower than a thermal conductivity of the permanent magnet.

An X-ray generator includes an X-ray tube configured to generate X-rays, an X-ray tube accommodation portion which accommodates at least a part of the X-ray tube and enclosing insulating oil, a second accommodation portion surrounding the X-ray tube accommodation portion when viewed in a tube axis direction of the X-ray tube, a blower fan configured to circulate gas inside a surrounding space defined between the X-ray tube accommodation portion and the second accommodation portion, and an X-ray shielding portion made of a material having a higher X-ray shielding ability than the X-ray tube accommodation portion and the second accommodation portion, and provided on an inner surface of the second accommodation portion.

X-ray generator

An X-ray generator includes an X-ray tube, an X-ray tube accommodation portion, and a power source unit having an internal substrate supplying a voltage to the X-ray tube sealed inside an insulating block. Insulating oil is enclosed in a space defined by an upper surface of the insulating block and an inner surface of the X-ray tube accommodation portion. A high-voltage power supply unit connected to a target support portion is disposed on the upper surface. At least one protrusion portion protruding to an insulating valve side beyond a boundary portion where the high-voltage power supply unit, the upper surface, and the insulating oil meet and surrounding the high-voltage power supply unit is provided on the upper surface. An apex portion of the protrusion portion is separated from an imaginary plane including an end portion of the insulating valve and extending in a direction orthogonal to a tube axis.

An X-ray generator includes an X-ray tube, an X-ray tube accommodation portion, and a power source unit having an internal substrate supplying a voltage to the X-ray tube sealed inside an insulating block. A first space is defined by an upper surface of the insulating block and an inner surface of the X-ray tube accommodation portion. A second space is defined by a recess portion opening to the outside formed on a side surface of the insulating block and a sealing member sealing an opening of the recess portion. A communication hole causing the first space and the second space to communicate with each other is provided in the insulating block. Insulating oil is enclosed in the first space and the second space. A depth of the recess portion is smaller than a width of the recess portion.

X-ray generating apparatus

Electrode for X-ray tube

An X-ray tube includes a vacuum housing, an electron gun, and an anode that includes a target emitting X-rays and a target supporting portion supporting the target. The target supporting portion has an anode main body portion and a protrusion portion including a side surface portion. The anode main body portion includes an outer circumferential surface extending in a direction of a tube axis, and a connection portion formed between the side surface portion of the protrusion portion and the outer circumferential surface. An angle formed by the outer circumferential surface and the connection portion is an obtuse angle.

An electron beam generator includes a cathode having a distal end portion emitting an electron beam, a first electrode accommodating the distal end portion, and a second electrode surrounding the first electrode when viewed from a direction along an emission axis of the electron beam. The first electrode has a first side wall surrounding the distal end portion. The second electrode has a second side wall separated from the first side wall and surrounding the first side wall. The first side wall is provided with a first opening portion allowing a first space surrounded by the first side wall and a second space between the first side wall and the second side wall to communicate with each other. The second electrode is provided with a second opening portion opening in the direction along the emission axis such that the second space and an external space communicate with each other.

Electron beam generator

An X-ray tube includes a rod-shaped anode which includes a target receiving electrons and generating X-rays and has a main body portion extending in a direction of a tube axis; a vacuum housing which accommodates a distal end side of the anode having the target disposed therein and in which a proximal end side of the anode is fixed by a housing coupling portion; and a cover electrode which is disposed inside the vacuum housing, is coupled to the anode by a cover coupling portion, and surrounds the housing coupling portion. The anode has a third diameter increasing portion protruding from a front surface of the main body portion in a direction intersecting the tube axis. The cover coupling portion is disposed closer to the proximal end side of the anode than the third diameter increasing portion.

An X-ray tube includes an electron gun, a target that generates X-rays, and a vacuum housing that accommodates the electron gun and the target. The vacuum housing has a metal portion having an X-ray emission window, and an insulation valve connected to the metal portion. The metal portion has a cylinder portion in which the X-ray emission window is provided and which surrounds a tube axis of the vacuum housing, and a tapered portion which is connected to an end portion of the cylinder portion, surrounds the tube axis, and protrudes such that a connection part between the metal portion and an insulation valve is covered. The tapered portion has a shape increased in diameter such that a separation distance between a distal end portion and the tube axis is longer than a separation distance between a base end portion and the tube axis.

An X-ray tube includes a metal portion in which an X-ray emission window is provided, an insulation valve which is joined to the metal portion and forms a vacuum region in cooperation with the metal portion, and a target and an electron gun which are accommodated in the vacuum region. The insulation valve has a low resistivity glass portion joined to the metal portion, and a high resistivity glass portion for fixing an anode including the target. A volume resistivity of a material forming the low resistivity glass portion is lower than a volume resistivity of a material forming the high resistivity glass portion. According to this configuration, electrification of the insulation valve is curbed, so that deterioration in withstand voltage ability of the insulation valve is curbed, and electric discharge caused by electrification is curbed.

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Hamamatsu, Japan

Atsushi Ishii