Gigaphoton Inc.

Atsushi Fuchimukai

Chen Qu

Osamu Wakabayashi

Yoichi Sasaki

Yohei Tanaka

A wavelength conversion apparatus according to an aspect of the present disclosure is a wavelength conversion apparatus that performs wavelength conversion of light through a non-linear crystal and including a first non-linear crystal, a container in which the first non-linear crystal is housed, a crystal holding member provided inside the container for fixing the first non-linear crystal, a first window provided to the container for guiding light to the first non-linear crystal from outside of the container, a second window provided to the container for guiding light output from the first non-linear crystal to outside of the container, a first heater provided inside the container for heating the first non-linear crystal, a battery that supplies electric power to the first heater, and a first controller that controls electric power supply to the first heater.

Wavelength conversion apparatus, solid-state laser system, and electronic device manufacturing method

In a laser system according to an aspect of the present disclosure, the following components are disposed: a first container that accommodates a first heater and a first crystal holder holding a first nonlinear crystal and includes a first light incident window via which laser light is incident and a first light exit window via which the laser light exits; a second container that accommodates a second heater and a second crystal holder holding a second nonlinear crystal and includes a second light incident window via which the laser light is incident and a second light exit window via which the laser light exits; and a stage that holds the first and second containers. A controller controls the stage to move the first nonlinear crystal away from the optical path of the laser light and inserts the second nonlinear crystal into the optical path of the laser light.

Laser system and method for manufacturing electronic devices

A wavelength converter including: A. a crystal holder configured to hold a nonlinear crystal configured to convert a wavelength of a laser beam incident thereon and output the wavelength-converted laser beam; B. a first container configured to accommodate the crystal holder and include a light incident window so provided as to intersect an optical path of the laser beam incident on the nonlinear crystal and a light exiting window so provided as to intersect the optical path of the laser beam having exited out of the nonlinear crystal; C. a second container configured to accommodate the first container; D. a position adjusting mechanism configured to adjust at least a position of the first container; and E. an isolation mechanism configured to spatially isolate the light incident window and the light exiting window from the position adjusting mechanism.

Wavelength converter

A wavelength converting apparatus includes a moving device including a crystal holder holding a nonlinear crystal for converting a wavelength of laser light incident thereon and outputting the laser light, and a driving unit including a voice coil motor and moving the holder at least in a direction orthogonal to a first direction that is an optical path axis direction of the laser light. The driving unit turns the holder to change an incident angle of the laser light on the crystal. The driving unit includes: a two-dimensional driving unit including a planar voice coil motor, and a one-dimensional driving unit including a cylindrical voice coil motor. The two-dimensional driving unit performs linear driving in a second direction orthogonal to the first direction, and rotary driving around a third direction orthogonal to the first and second directions. The one-dimensional driving unit performs linear driving in the third direction.

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Oyama, Japan

Atsushi Fuchimukai