Mitsubishi Denki Kabushiki Kaisha

Atsuko Kawai

Katsuhiko Tamura

A DRAM providing a capacitor capacity sufficient for maintaining stable storage of data even if elements are further reduced in size in accordance with high density integration of semiconductor devices is disclosed. The DRAM has its capacitor upper electrode formed of an upper layer and a lower layer, and its capacitor lower electrode formed to surround the lower layer of the capacitor upper layer, and the upper layer of the capacitor upper layer formed to cover the upper surface and both sides of the capacitor lower electrode. Thus, a capacitor capacity is tremendously increased as compared to a conventional one in the same plane area as the conventional one.

Growing community of inventors

Hyogo, Japan

Atsuko Kawai