Tohoku University

Honda Motor Co., Ltd.

Keihin Corporation

Kelk Ltd.

Atsuki Komiya

Shigenao Maruyama

Norio Takahashi

Wataru Kiyosawa

Yusuke Nishimura

Yoshito Tsukamoto

Hiroaki Takechi

Morimasa Nagata

Seiji Kosaka

Yasuhiro Kawamura

Hajime Tsukui

Takuya Ouchi

Junnosuke Okajima

Shuichi Moriya

Junya Negishi

Yoshita Tsukamoto

A cooling device includes a heat receiver that receives heat of an electronic component via a coolant, a heat discharger that discharges heat of the coolant from the heat receiver, and a circulation flow path through which the coolant flows from the heat receiver to the heat discharger and the coolant flows from the heat discharger to the heat receiver. The heat receiver is provided with an attachment surface to which a plurality of the electronic components are attached, a first flow path that communicates with the circulation flow path, and a plurality of surface area increasing members that communicate with the first flow path and that are provided on a rear surface of the attachment surface corresponding to the plurality of electronic components.

Cooling device

When a temperature of a semiconductor wafer is controlled to be a target temperature by raising the temperature of the semiconductor wafer, switching is performed so that a high-temperature circulating liquid at a temperature higher than the target temperature in a high-temperature tank is supplied into an inside-stage flow channel, and respective thermoelectric elements in a plurality of zones in a stage are controlled; and then, the temperature of the semiconductor wafer matches the target temperature and a desired in-plane temperature distribution of the semiconductor wafer is provided.

Apparatus and method for controlling temperature of semiconductor wafers

Disclosed is a piston cooling device wherein the cooling efficiency of a piston is improved by oil injected from an oil jet and supplied to a cooling passage provided in the piston, and the amount of cooling oil is reduced when an internal combustion engine is operated at maximum output. The piston cooling device is provided with a piston for an internal combustion engine, in which a circumferential passage and a cooling passage having an inlet passage and an outlet passage are provided, and an oil jet for injecting oil from an injection port to the inlet passage. The oil jet injects oil at every stroke of the piston so that a two-phase plug flow composed of gas and oil is formed in the cooling passage at least when an internal combustion engine is operated at maximum output.

Piston cooling device

Growing community of inventors

Miyagi, Japan

Atsuki Komiya