Air Products and Chemicals, Inc.

Versum Materials Us, LLC

Athanasios Georgios Tsirukis

James Robert Leenhouts

Howard P Withers, Jr

Reinaldo Mario Machado

John T Lileck

Vipul P Dholakia

Stuart Alexander Kerr

Richard Peter Boehme

Christopher L Hartz

Benjamin James Arthur Inman

Benjamin James Arthur

William F Schulze

Jeffrey Ronald Phillips

Anthony J Zehnder

Kenneth E Fegley

This invention is an apparatus and a method for continuously generating a hydride gas of Mwhich is substantially free of oxygen in a divided electrochemical cell. An impermeable partition or a combination of an impermeable partition and a porous diaphragm can be used to divide the electrochemical cell. The divided electrochemical cell has an anode chamber and a cathode chamber, wherein the cathode chamber has a cathode comprising M, the anode chamber has an anode comprising Mand is capable of generating oxygen, an aqueous electrolyte solution comprising a hydroxide MOH partially filling the divided electrochemical cell. Hydride gas generated in the cathode chamber and oxygen generated in the anode chamber are removed through independent outlets. Mcan be selenium, phosphorous, silicon, metal or metal alloy, Mis metal or metal alloy suitable for anionic oxygen generation, and Mis NHor an alkali or alkaline earth metal.

Divided electrochemical cell and low cost high purity hydride gas production process

Fluid flow valve assembly comprising a valve body having an external port and an inlet end having at least a first port, a second port, and a third port; a first valve disposed within the valve body and adapted to control fluid flow between the first and second ports; and a second valve disposed within the valve body and adapted to control fluid flow between the third port and the external port.

Dual-flow valve and internal processing vessel isolation system

The present invention is directed to an improved reaction process that allows for the achievement of excellent NFproduction yields, while minimizing the amount of unreacted fluorine exiting with the process gases and minimizing the amount of liquid melt waste (HF/NH) produced by the process. The basic NFprocess resides in reacting Fwith an ammonium ion source, e.g., ammonium acid fluoride, under conditions for forming NF. The improvement in the process comprises:

Process for the production of nitrogen trifluoride

A process for reducing or eliminating NH /HF/MFz liquid waste melt in the manufacture of NF is provided which includes the steps of providing an NF reactor for a reaction of F with a liquid NH /HF/MFz mixture that produces NF , HF, N and other nitrogen fluorides as gaseous products and a liquid NH /HF/MFz mixture as the liquid waste melt. The process further provides for reduction or elimination of the liquid NH /HF/MFz waste melt produced by the reactor.

Process for the reduction or elimination of NH3/HF byproduct in the manufacture of nitrogen trifluoride

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Bethlehem, PA, United States of America

Athanasios Georgios Tsirukis