Kobe Steel, Ltd.

Asuka Nagamine

Hiroshi Tamagaki

The present invention is to provide a deposition device capable of coping with a size change of a substrate only by replacing a magnet unit and a target material. A deposition device () of the present invention is to perform deposition onto a surface of a substrate W to be conveyed by using an evaporation source () facing a front surface of the substrate (W), and the evaporation source () has a target material (), a backing plate (), a magnet unit (), a cathode body (), and a cooling water flow passage (). The cooling water flow passage () is a space formed by separating the magnet unit () and the backing plate (), and the cooling water can be distributed through this space. As the magnet unit (), a short magnet unit can be arranged in correspondence with a narrow-width substrate having narrower width than that of the substrate (W), and as the target material (), a short target material is arranged in correspondence with width of the arrange magnet unit ().

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Takasago, Japan

Asuka Nagamine