Commissariat a L'energie Atomique

Centre National De La Recherche Scientifique

Université Paul Sabatier (toulouse Iii)

Ulis

Commissariat &#xc0; L'&#xc9;nergie Atomique Et Aux &#xc9;nergies Alternatives

Astrid Astier

Jean-Louis Ouvrier-Buffet

Jean-Jacques Yon

Michel Vilain

Philippe Tailhades

Pierre Imperinetti

Claire Vialle

Lionel Presmanes

Corinne Bonningue

Stephanie Capdeville

Stéphanie Capdeville

Corine Bonningue

The present invention relates to the use as a sensitive material in a thin layer for bolometric detection of infrared radiation, of a material having a spinel ferrite structure of chemical composition, ignoring doping agents if any are present, satisfying empirical formula I:FeMAO.The invention also provides a bolometric device for detecting infrared radiation or for infrared imaging, and including at least one sensor provided with a sensitive element in the form of a thin layer as defined above.

Use of spinel ferrites as sensitive material for bolometric infrared detector devices

The absorbent membrane of the detector is fixed in suspension by at least one thermally insulating support part onto a front face of a substrate comprising at least two electric connection terminals electrically connected to the membrane, for example by means of conducting layers. The support part has at least one base end and a raised zone. The base end is fixed to a top part of a conducting pillar having a base fixedly secured to one of the electric connection terminals. A substantially flat zone of a bottom face of the membrane is directly in contact with the raised zone of the support part. The support part is preferably formed by a bridge having a second base end fixed to a top part of a second pillar, the raised zone being formed by a flat middle part of the bridge.

Thermal electromagnetic radiation detector comprising an absorbent membrane fixed in suspension

An absorbent membrane () is fixed in suspension onto a front face of a substrate (), in a direction substantially parallel to the substrate (), by at least one alveolate structure thermally insulating the membrane from the substrate () and arranged in a plane substantially perpendicular to the substrate (). The detector can comprise arms () fixedly secured to the absorbent membrane (). The alveolate structures can be respectively arranged between one of the arms () and the substrate (). The alveolate structure can be formed by a plurality of superposed thin layers () separated by spacers () or by superposed rows of arcades formed by thin layers. The alveolate structure can comprise a porous pad.

Thermal electromagnetic radiation detector with alveolate structure

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Voreppe, France

Astrid Astier