Applied Materials, Inc.

Ashwin Chockalingham

Rajeev Bajaj

Daniel Redfield

Boyi Fu

Mahendra Christopher Orilall

Mayu Felicia Yamamura

Implementations described herein generally relate to polishing articles and methods of manufacturing polishing articles used in polishing processes and cleaning processes. More particularly, implementations disclosed herein relate to composite polishing articles having graded properties. In one implementation, a polishing article is provided. The polishing article comprises one or more exposed first regions formed from a first material and having a first zeta potential and one or more second exposed regions formed from a second material and having a second zeta potential, wherein the first zeta potential is different from the second zeta potential.

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San Jose, CA, United States of America

Ashwin Chockalingham