Cambridge Enterprise Limited

Silicon Microgravity Limited

Ashwin Arunkumar Seshia

Pradyumna Thiruvenkatanathan

Xudong Zou

Jize Yan

Kenichi Soga

Yu Jia

The invention provides a resonant sensor comprising: a substrate; one or more proof masses suspended from the substrate to allow for movement of the one or more proof masses along a sensitive axis; a first resonant element having a first end and a second end, the first resonant element extending between the first end and the second end along the sensitive axis, wherein the first end is connected to the one or more proof masses through a non-inverting lever and the second end is connected to the one or more proof masses through an inverting lever; and an electrode assembly positioned adjacent to the first resonant element. A resonant sensor in accordance the invention comprises a resonant element that is suspended between two proof masses or between two portions of a single proof mass, and so is not connected directly to the substrate. This isolates the resonant element from thermal stress that might otherwise be transferred from the substrate.

High performance micro-electro-mechanical systems accelerometer with suspended sensor arrangement

An energy harvester is provided for harvesting energy, and in particular electrical energy from an input vibration such as an ambient vibration. The energy harvester comprises a first mechanical amplifier responsive to the input vibration and a second mechanical amplifier coupled to the first mechanical amplifier. At least one of the first and second mechanical amplifiers comprises a parametric resonator, and a power output of the energy harvester is generated by damping the second mechanical amplifier.

Energy-harvesting apparatus with plural mechanical amplifiers

Growing community of inventors

Cambridgeshire, United Kingdom

Ashwin Arunkumar Seshia