Bruker Technologies Ltd.

Tel Aviv University

Jordan Valley Applied Radiation Ltd.

Jordan Valley Semiconductors Ltd.

Bruker Jv Israel Ltd.

Asher Peled

Alexander Krokhmal

Boris Yokhin

Matthew Wormington

Shlomo Ruschin

Isaac Mazor

Menachem Nathan

David Berman

Dileep Kumar Agnihotri

Judith Rishpon

Yifaat Betzalel

Yuri Vinshtein

Dor Perry

Alexander Tokar

Tachi Rafaeli

Tali Zohar

Alexander Brandt

Guy Sheaffer

Alex Brandt

A system includes first and second imaging assemblies, and a processor. The first imaging assembly is configured to produce a first image of a measurement site in a sample. The second imaging assembly is coupled with a measurement assembly and is configured to produce a second image of the measurement site. The processor is configured to: (i) perform, based on the first image, a first movement of the sample relative to the measurement assembly, (ii) perform, based on the second image, a second movement of the sample for aligning the sample with the measurement assembly, and (iii) control the measurement assembly to perform a measurement in the measurement site.

Navigation accuracy using camera coupled with detector assembly

A system for X-ray analysis, includes: (a) an X-ray analysis assembly configured to (i) direct an X-ray beam to impinge on a surface of a sample, and (ii) receive fluorescence radiation excited from the sample in response to the impinged X-ray beam, (b) a target assembly including measurement targets: placed in an optical path between the X-ray analysis assembly and the sample, and configured to move between (i) one or more first positions in which one or more of the measurement targets are positioned in the X-ray beam, and (ii) one or more second positions in which the optical path is unobstructed by the target assembly, and (c) a processor, configured to control movement of the target assembly between the first and second positions, for alternately, (i) monitoring properties of the X-ray beam using the measurement targets, and (ii) performing the X-ray analysis at a measurement site of the sample.

Monitoring properties of X-ray beam during X-ray analysis

An X-ray apparatus includes a mount, an X-ray source, a detector, an optical gauge and a motor. The mount is configured to hold a planar sample having a first side, which is smooth, and a second side, which is opposite the first side and on which a pattern has been formed. The X-ray source is configured to direct a first beam of X-rays toward the first side of the sample. The detector is positioned on the second side of the sample so as to receive at least a part of the X-rays that have been transmitted through the sample and scattered from the pattern. The optical gauge is configured to direct a second beam of optical radiation toward the first side of the sample, to sense the optical radiation that is reflected from the first side of the sample, and to output a signal, in response to the sensed optical radiation, that is indicative of a position of the sample. The motor is configured to adjust an alignment between the detector and the sample in response to the signal.

Wafer alignment for small-angle x-ray scatterometry

An X-ray apparatus includes a mount, an X-ray source, a detector, an actuator, and a controller. The mount is configured to hold a sample. The X-ray source is configured to direct a beam of X-rays toward a first side of the sample. The detector is positioned on a second side of the sample, opposite the first side, so as to receive at least a portion of the X-rays that have been transmitted through the sample and to output signals indicative of an intensity of the received X-rays. The actuator is configured to scan the detector over a range of positions on the second side of the sample so as to measure the transmitted X-rays as a function of a scattering angle. The controller is coupled to receive the signals output by the detector and to control the actuator, responsively to the signals, so as to increase an acquisition time of the detector at first positions where the intensity of the received X-rays is weak relative to the acquisition time at second positions where the intensity of the received X-rays is strong.

X-ray detection optics for small-angle X-ray scatterometry

An apparatus includes an X-ray tube, X-ray optics, one or more coils and control circuitry. The X-ray tube is configured to direct an electron beam onto an anode so as to emit an X-ray beam. The X-ray optics which configured to receive the X-ray beam emitted from the X-ray tube and to direct the X-ray beam onto a target. The coils are configured to steer the electron beam in the X-ray tube using electrical currents flowing through the coils. The control circuitry is configured to compensate for misalignment between the X-ray tube and the X-ray optics by analyzing the X-ray beam output by the X-ray optics, and setting the electrical currents based on the analyzed X-ray beam.

X-ray source assembly

A method includes directing an X-ray beam to be incident at a grazing angle on a location on a surface of the sample. An X-ray fluorescence excited at the location is measured. A reflection angle of the X-ray beam from the surface and a transmission angle of the X-ray beam are measured. An angle of incidence of the X-ray beam on the surface is evaluated using the measured reflection and transmission angles, and the measured X-ray fluorescence is analyzed using the evaluated angle of incidence.

Angle calibration for grazing-incidence X-ray fluorescence (GIXRF)

Light-emitting intra-cavity interferometric (ICI) optical sensors based on channel waveguide structures which include an internal light emitting material and a functionalized region. In some embodiments, the waveguides are made of a sol-gel which incorporates the light emitting material. In some embodiments, the waveguide structure includes an ICI resonator backbone and the ICI sensor is a laser sensor. In some embodiments, the resonator backbone has an interferometric Y-branch shape. In some embodiments, the resonator backbone has a Mach Zehnder interferometer shape. In some embodiments, an ICI laser sensor has an interferometric arrayed waveguide grating shape. In some embodiments, an ICI sensor may be remotely optically pumped and remotely read.

Light-emitting intra-cavity interferometric sensors

A method for analyzing a sample includes directing one or more beams of X-rays to impinge on an area of a surface of the sample on which a layer of nano-particles of a selected element has been formed. Secondary X-ray radiation from the area is detected responsively to the one or more beams. A distribution of the nano-particles on the surface is characterized based on the detected radiation.

X-ray measurement of properties of nano-particles

A method for X-ray analysis of a sample includes directing a beam of X-rays to impinge on a structure in the sample such that the X-rays are scattered from the structure in a pattern of stripes, and receiving the scattered X-rays using an array of detectors. A relative alignment between the sample and the array is adjusted so that the stripes are parallel to the detectors.

Target alignment for X-ray scattering measurements

A method for inspection of a sample includes irradiating the sample with a beam of X-rays and measuring a distribution of the X-rays that are emitted from the sample responsively to the beam, thereby generating an X-ray spectrum. An assessment is made of an effect on the spectrum of a non-uniformity of the beam, and the spectrum is corrected responsively to the effect.

Calibration of X-ray reflectometry system

A biological or chemical optical sensing device comprises at least one planar micro-resonator structure included in a light emitting waveguide, and at least one biological or chemical probe bound to at least a part of the micro-resonator structure, the probe operative to bind specifically and selectively to a respective target substance, whereby the specific and selective binding results in a parameter change in light emitted from the waveguide. In one embodiment, the micro-resonator is linear. In some embodiments, the sensing device is active, the waveguide including at least one photoluminescent material operative to be remotely pumped by a remote optical source, and the parameter change, which may include a spectral change or a quality-factor change, may be remotely read by an optical reader.

Planar-resonator based optical chemo- and biosensor

A method for inspection of a sample includes directing a beam of X-rays toward a sample and configuring an array of detector elements to capture the X-rays scattered from the sample. The sample is shifted in a direction parallel to the axis of the array between at least first and second positions, which positions are separated one from another by an increment that is not an integer multiple of the pitch of the array. At least first and second signals are generated by the detector elements responsively to the X-rays captured thereby while the sample is in at least the first and second positions, respectively. The first and second signals are combined so as to determine an X-ray scattering profile of the sample as a function of position along the axis.

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Kfar-Vradim, Israel

Asher Peled