Applied Materials, Inc.

Oceanit Laboratories, Inc.

William Marsh Rice University

City University of New York

Ashavani Kumar

Nag B Patibandla

Hou Tee Ng

Ajey M Joshi

Kasiraman Krishnan

Rajeev Bajaj

Daniel Redfield

Ashwin Chockalingam

Bernard Frey

Bharath Swaminathan

Eric Ng

Fred Conrad Redeker

Vinod P Veedu

Boyi Fu

Mario Dagio Cornejo

Sumil Thapa

Amritanshu Sinha

Mahendra Christopher Orilall

Pulickel Madhavapanicker Ajayan

Jason Garcheung Fung

Gregory E Menk

Mayu Felicia Yamamura

Robert E Davenport

Ganesh Arumugam

Aniruddh Jagdish Khanna

Veera Raghava Reddy Kakireddy

Venkat Hariharan

Sivapackia Ganapathiappan

Yan Zhao

Ranga Rao Arnepalli

Venkat Kamavaram

Christopher J Sullivan

George John

Praveen Kumar Vemula

Derek Ah Yo

Hemtej Gullapalli

Anubha Goyal

Andres Rafael Botello-Mendez

Mauricio Terrones Maldonado

A surface modification method involves oxidizing a surface of a material and etching the surface, and repeating the oxidizing and etching one or more times until desired nanostructures are created in the surface. The desired nanostructures make the nanostructured surface superhydrophilic. Hydrophilic properties of the surface may be further developed by application of hydrophilic material, and by application of functionalized micro/nanoparticles to the hydrophilic material. Substitution of hydrophobic material for the hydrophilic material creates a superhydrophobic surface. Further addition of an omniphobic coating to the functionalized micro/nanoparticles creates a durable omniphobic surface.

Methods of manipulating surfaces for extreme hydrophilic, hydrophobic or omniphobic behavior and applications thereof

Embodiments described herein relate to integrated abrasive (IA) polishing pads, and methods of manufacturing IA polishing pads using, at least in part, surface functionalized abrasive particles in an additive manufacturing process, such as a 3D inkjet printing process. In one embodiment, a method of forming a polishing article includes dispensing a first plurality of droplets of a first precursor, curing the first plurality of droplets to form a first layer comprising a portion of a sub-polishing element, dispensing a second plurality of droplets of the first precursor and a second precursor onto the first layer, and curing the second plurality of droplets to form a second layer comprising portions of the sub-polishing element and portions of a plurality of polishing elements. Here, the second precursor includes functionalized abrasive particles having a polymerizable group chemically bonded to surfaces thereof.

Integrated abrasive polishing pads and manufacturing methods

Embodiments of the present disclosure provide for abrasive delivery (AD) polishing pads and manufacturing methods thereof. In one embodiment, a method of forming a polishing article includes forming a sub-polishing element from a first curable resin precursor composition and forming a plurality of polishing elements extending from the sub-polishing element. Forming the plurality of polishing elements includes forming a continuous polymer phase from a second curable resin precursor composition and forming a plurality of discontinuous abrasive delivery features disposed within the continuous polymer phase. The sub-polishing element is formed by dispensing a first plurality of droplets of the first curable resin precursor composition. The plurality polishing elements are formed by dispensing a second plurality of droplets of the second curable resin precursor composition. In some embodiments, the discontinuous abrasive delivery features comprise a water soluble material having abrasive particles interspersed therein.

Abrasive delivery polishing pads and manufacturing methods thereof

Embodiments of the present disclosure relate to advanced polishing pads with tunable chemical, material and structural properties, and new methods of manufacturing the same. According to one or more embodiments of the disclosure, it has been discovered that a polishing pad with improved properties may be produced by an additive manufacturing process, such as a three-dimensional (3D) printing process. Embodiments of the present disclosure thus may provide an advanced polishing pad that has discrete features and geometries, formed from at least two different materials that include functional polymers, functional oligomers, reactive diluents, and curing agents. For example, the advanced polishing pad may be formed from a plurality of polymeric layers, by the automated sequential deposition of at least one resin precursor composition followed by at least one curing step, wherein each layer may represent at least one polymer composition, and/or regions of different compositions.

Precursor formulations for polishing pads produced by an additive manufacturing process

An optically transparent radar absorbing material has alternating layers of optically transparent conductive material with layers of even thickness of optically transparent material having a homogenous dielectric constant. The even thickness is one quarter of the wavelength of a targeted electromagnetic energy.

Optically transparent radar absorbing material (RAM)

An additive manufacturing system includes a platen having a top surface, a support structure, a powder dispenser coupled to the support structure and positioned above the platen and configured to deliver a powder in a linear region that extends along a first axis, a gas dispenser coupled to the support structure in a fixed position relative to the powder dispenser and having an outlet to deliver a gas across the outermost layer of feed material, an energy source configured to selectively fused the layer of powder, and an actuator coupled to the support to move the support with the powder dispenser and the gas dispenser together along a second axis perpendicular to the first axis and parallel to the top surface such that the linear region and the outlet sweep along the second axis to deposit the powder in a swath over the platen and deliver the gas.

Additive manufacturing with gas delivery and dispenser on common support

Additive manufacturing includes successively forming a plurality of layers on a support. Depositing a layer from the plurality of layers includes dispensing first particles, selectively dispensing second particles in selected regions corresponding to a surface of the object, and fusing at least a portion of the layer. The layer has the first particles throughout and the second particles in the selected regions. Alternatively or in addition, forming the plurality of layers includes depositing multiple groups of layers. Depositing a group of layers includes, for each layer in the group of layers dispensing a feed material to provide the layer, and after dispensing the feed material and before dispensing a subsequent layer fusing a selected portion of the layer. After all layers in the group of layers are dispensed, a volume of the group of layers that extends through all the layers in the group of layers is fused.

Apparatus for fusing of multiple layers in additive manufacturing

Polishing pads produced by an additive manufacturing process

Selective material dispensing in additive manufacturing

An additive manufacturing apparatus for forming a part includes a support, a first dispenser to deliver a layer of first particles on a support or an underlying layer on the support, a second dispenser to deliver second particles onto the layer of first particles such that the second particles infiltrate into the layer of first particles, an energy source to fuse the first particle and second particles to form a fused layer of the part, and a controller coupled to the first dispenser, second dispenser and energy source.

Material dispensing and compaction in additive manufacturing

A shock consolidation material manufacturing method involves combining a nanoscale additive and ceramic nanoparticles to create a nano-powder, compacting the nano-powder mechanically, and performing shock-wave consolidation on the compacted nano-powder. The ceramic nanoparticles may be Yttria-stabilized tetragonal Zirconia (YSZ) or Samarium doped Ceria (SDC). The nanopowder may be CNT-YSZ or SDC-NaCO. The shock-wave consolidation may be performed with a laser, and may involve positioning the nano-powder on a support material, placing an ablative layer over the support material and nano-powder, placing a transparent re-usable capping layer over the ablative layer, and directing laser energy at the capping layer, turning an area of the ablative layer below the capping layer into plasma and generating shock waves through the nano-powder and support material.

Methods for material synthesis and manufacturing using shock consolidation

An additive manufacturing system includes a platen having a top surface to support an object being manufactured, a feed material dispenser to deliver a plurality of successive layers of feed material over the platen, an energy source positioned above the platen to fuse at least a portion of an outermost layer of feed material, and a coolant fluid dispenser to deliver a coolant fluid onto the outermost layer of feed material after at least a portion of the outermost layer has been fused.

Additive manufacturing with coolant system

Additive manufacturing of an object includes dispensing a plurality of successive layers of powder over a top surface of a platform, fusing an object region in each of the plurality of successive layers to form the object, and fusing a brace region in a particular layer from the plurality of layers to form a brace structure to inhibit lateral motion of the powder. The brace structure is spaced apart from the particular object region by a gap of unfused powder.

Method for forming brace structures for additive manufacturing

Growing community of inventors

Sunnyvale, CA, United States of America

Ashavani Kumar