Kanto Kagaku Kabushiki Kaisha

Asaaki Yamashita

Kiyoto Mori

Tsugio Saito

Shiro Shimauchi

The present invention relates to a process for recovering and reusing a resist composition which comprises the steps of (a) collecting resin composition scattered from a spinner during application of the resist composition onto silicon wafers and otherwise no longer used and to be disposed of as waste liquid; (b) introducing the resist composition into a recovery tank; (c) introducing, while measuring the viscosity of the resist composition in the recovery tank, a solvent into the recovery tank in accordance with the measured viscosity until the resist composition shows a predetermined viscosity; (d) discontinuing the solvent supply when the viscosity of the resist composition has reached a predetermined value; (e) transferring the resist composition with the predetermined viscosity to a storage tank; and (f) taking out, whenever necessary, the resist composition from the storage tank for reuse.

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Saitama, Japan

Asaaki Yamashita