Monsanto Company

Arrowhead Industrial Water, Inc.

Arthur J Ackermann

Robert A Craven

Peter L Tremont

This invention is directed to a hydraulic multiplex unit for receiving continuously one or more samples of liquid from a liquid purification system of distribution system and redirecting such sample or samples randomly or in sequence to one or more analytical instruments. The sample collecting system and multiplex unit is periodically backflushed with ozone to maintain the collection and analysis system clean of impurities, particles and the like which adversely affect the composition of the fluid samples.

Ultra pure water system monitoring

A process is disclosed for manufacturing an integrated circuit in which multiple patterned layers of thin film materials are provided on a silicon wafer. The wafer is conditioned between the providing of layers, after each etching step, by rinsing the item with a purified water solution containing at least 0.01 ppm ozone, preferably between 0.02 and 0.09 ppm ozone.

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Kirkwood, MO, United States of America

Arthur J Ackermann