Agilent Technologies, Inc.

Avago Technologies General IP Pte, Ltd.

Arthur Fong

Marvin Glenn Wong

Albert An-Bon Yeh

Regina Nora Pabilonia

Thomas James Weaver

The present invention relates to an electrical relay in which a solid slug is moved within a channel and used to make or break an electrical connection. The solid slug is moved by electromagnets. In the preferred embodiment, the slug is wetted by a conducting liquid, such as liquid metal, that also adheres to wettable contact pads within the channel to provide a latching mechanism. The relay is amenable to manufacture by micro-machiningtechniques.

Method of manufacturing an electromagnetic relay

A semiconductor substrate is presented which is manufactured from hollow, gas-filled glass or ceramic microspheres, which are bound together in a dried or fired matrix. The microspheres may be glass-coated microspheres, which are bound together by sintering the outer layers of glass together. The semiconductor surface may be smoothed by glazing the surface.

Integrated circuit substrate material and method

The present invention is a piezoelectrically actuated relay that latches. The relay operates by means of the longitudinal displacement of a piezoelectric element in extension mode. The piezoelectric element displaces a liquid metal drop and causing it to wet between at least one set of contact pads and at least one other set of contact pads. Positioning of the liquid metal causes the optical path to be blocked. The same motion that causes the liquid metal drop to change position can cause the optical path to be unblocked between the fixed pad and a contact pad on the piezoelectric element or substrate close to it. The motion of the piezoelectric element is rapid and causes the imparted momentum of the liquid metal drop to overcome the surface tension forces that would hold the bulk of the liquid metal drop in contact with the contact pad or pads near the actuating piezoelectric element. The switch latches by means of surface tension and the liquid metal wetting to the contact pads.

Longitudinal piezoelectric optical latching relay

A closed-loop piezoelectric pump is disclosed for use in a fluid delivery system. The pump housing includes a movable diaphragm that defines a pumping chamber within the pump housing, the pumping chamber having an inlet for admitting fluid and an outlet for emitting fluid. A piezoelectric transducer is coupled to the moveable diaphragm and operates to produce a pumping action by varying the volume of the pumping chamber. The piezoelectric transducer may be used to generate an acoustic pressure pulse within the fluid delivery system and to sense reflections of the acoustic pressure pulse caused by impedance changes downstream of the pump. Properties of the fluid path downstream of pump may be determined from the characteristics of the sensed reflections.

Closed-loop piezoelectric pump

A method and apparatus for multiplexing and demultiplexing optical signals. The apparatus includes first and second optical waveguides coupled via an optical coupler. The optical coupler has a coupling waveguide and an optical switching wedge attached to a piezoelectric actuator. In operation, first and second optical signals are received by the first and second optical waveguides, respectively. If the signals are to be combined, the optical switching wedge is moved to a first position where it is optically coupled to the first optical waveguide. The first optical signal is then transmitted, via the coupling waveguide, to the second optical waveguide, where it is combined with the second optical signal. If the signals are not to be combined, the optical switching wedge is moved to a second position where it is optically uncoupled from the first optical waveguide.

Reflecting wedge optical wavelength multiplexer/demultiplexer

A method and apparatus for maintaining a liquid metal switch in a state of readiness for switching. The liquid metal switch has a liquid metal volume contained in a cavity of a switch body. A signal path though the cavity is made or broken by energizing an actuator to move the liquid metal volume within the cavity in response to a switching signal. To maintain readiness, a signal generator supplies a vibratory signal to the actuator. The resulting vibrations in the liquid metal volume allow the liquid metal volume to be subsequently moved with reduced power.

Method and apparatus for maintaining a liquid metal switch in a ready-to-switch condition

A method and structure for an optical switch. A channel is housed within a solid material. Contacts coupled to the channel are further coupled to the solid material, while a plurality of piezoelectric elements are coupled to chamber and further coupled to a slug. Optical waveguides are coupled to the channel. The contacts are coupled to a plurality of liquid metal globules, wherein one or more of the plurality of liquid metal globules are coupled to a slug. One or more piezoelectric elements are actuated, causing the slug to be moved within the channel. The motion of the slug is operable to block or unblock one or more of the plurality of optical waveguides.

Method and structure for a slug assisted longitudinal piezoelectrically actuated liquid metal optical switch

In accordance with the invention, a piezoelectrically actuated relay that switches and latches by means of a solid slug and liquid metal is disclosed. The relay operates by means of a longitudinal displacement of a piezoelectric element in extension mode displacing a liquid metal drop and causing it to wet between at least one contact pad on the piezoelectric element or substrate and at least one other fixed pad to close the switch contact. This motion of the piezoelectric element is rapid and causes the imparted momentum of the solid slug and liquid metal drop to overcome the surface tension forces that would hold the bulk of the liquid metal drop in contact with the contact pad or pads near the actuating piezoelectric element. The switch latches by means of surface tension and the liquid metal wetting to the contact pads.

Solid slug longitudinal piezoelectric latching relay

An electromagnetic optical relay is disclosed in which a solid slug moves within a switching channel formed in relay housing. An optical path passing through the switching channel is blocked or unblocked by motion of the solid slug. Motion of the solid slug is controlled by at least two electromagnetic actuators, such as electrical coils surround the switching channel. Motion of the solid slug is resisted by a liquid, such as a liquid metal, that wets between the solid slug and at least one fixed contact pad in the switching channel. The surface tension of the liquid provides a latching mechanism for the relay. An optical signal may be reflected from the wetted surface of the solid slug and switched to an alternative optical path.

Longitudinal electromagnetic latching optical relay

Fluid-based switches and a method for producing the same are disclosed. In one embodiment, the switch comprises first and second mated substrates defining therebetween at least portions of a number of cavities, a plurality of electrodes exposed within one or more of the cavities, a switching fluid that serves to open and close at least a pair of electrodes in response to forces applied to the switching fluid, a surface tension modifier coating at least a portion of the switching fluid, and an actuating fluid, held within one or more of the cavities, that applies the forces to the switching fluid.

Fluid-based switch

A piezoelectric optical relay array having one or more array elements. Each array element contains a transparent mirror housing, located at the intersection of two optical paths. A liquid metal slug is moved within a channel passing through the transparent mirror housing by the action of piezoelectric elements. The liquid metal slug is moved in or out of the transparent mirror housing to select between the optical paths. When the liquid metal slug is within the transparent mirror housing, an incoming optical signal is reflected from a reflective surface of the slug. The liquid metal of the slug adheres to wettable metal surfaces within the channel to provide a latching mechanism.

Longitudinal mode optical latching relay

An electrical relay that uses a conducting liquid in the switching mechanism. In the relay, a pair of moveable switching contacts is positioned between a pair of fixed electrical contact pads. A surface of each contact supports a droplet of a conducting liquid, such as a liquid metal. An actuator is energized to move the pair of switching contacts, closing the gap between one of the fixed contact pads and one of the switching contacts, thereby causing conducting liquid droplets to coalesce and form an electrical circuit. At the same time, the gap between the other fixed contact pad and the other switching contact is increased, thereby causing conducting liquid droplets to separate and break an electrical circuit. The actuator is then de-energized and the switching contacts return to their starting positions. The volume of liquid metal is chosen so that liquid metal droplets remain coalesced or separated because of surface tension in the liquid. The relay is amenable to manufacture by micro-machining techniques.

High frequency push-mode latching relay

A piezoelectric optical relay is disclosed in which a solid slug moves within a switching channel formed in relay housing. An optical path passing through the switching channel is blocked or unblocked by motion of the solid slug. Motion of the solid slug is controlled by at least two piezoelectric actuators within the switching channel. Motion of the solid slug is resisted by a liquid, such as a liquid metal, that wets between the solid slug and at least one fixed contact pad in the switching channel. The surface tension of the liquid provides a latching mechanism for the relay.

Damped longitudinal mode optical latching relay

An electrical relay array using conducting liquid in the switching mechanism. The relay array is amenable to manufacture by micro-machining techniques. Each element of the relay array uses an actuator, such as a piezoelectric element, to cause a switch actuator to insert into a cavity in a static switch contact structure. The cavity has sides and a pad on its end that are wettable by the conducting liquid. The cavity is filled with the conducting liquid, which may be liquid metal. Insertion of the switch actuator into the cavity causes the conducting liquid to be displaced outward and come in contact with the contact pad on the switch actuator. The volume of conducting liquid is chosen so that when the actuator returns to its rest position, the electrical contact is maintained by surface tension and by wetting of the contact pads on both the static switch contact structure and the actuator. When the switch actuator retracts away from the static switch contact structure, the available volume for conducting liquid inside the fixed switch contact structure increases and the combination of the movement of the conducting liquid into the cavity and the contact pad on the switch actuator moving away from the bulk of the conducting liquid causes the conducting liquid connection between the fixed and moving contact pads to be broken. When the switch actuator returns to its rest position, the contact remains electrically open because there is not enough conducting liquid to bridge the gap without being disturbed. The high frequency capability is provided by the additional conductors in the assembly, which act to make the switch a coaxial structure.

Insertion-type liquid metal latching relay array

A piezoelectric relay is disclosed in which a solid slug moves within a switching channel formed in relay housing. An electrical circuit passing between fixed contact pads in the switching channel is completed or broken by motion of the solid slug. Motion of the solid slug is controlled by at least two piezoelectric actuators within the switching channel. Motion of the solid slug is resisted by an electrically conductive liquid, such as a liquid metal, that wets between the solid slug and the contact pad in the switching channel. The surface tension of the, liquid provides a latching mechanism for the relay.

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Colorado Springs, CO, United States of America

Arthur Fong