Oc Oerlikon Balzers Ag

Oerlikon Solar Ag, Truebbach

Roth & Rau Ag

Oc Oerlikon Blazers Ag

Oerlikon Solar Ag

Tel Solar Ag

Oerlikon Solar Ag, Trubbach

Arthur Buechel

Werner Wieland

Christoph Ellert

Joachim Mai

Mustapha Elyaakoubi

Benjamin Strahm

Laurent Sansonnens

Rainer Ostermann

Guillaume Wahli

Thomas Schulze

A capacitive-coupled parallel plate plasma enhanced chemical vapor deposition reactor includes a gas distribution unit that is integrated in an RF electrode and is formed with a gas outlet. The parallel plate reactor is configured so that layers with high thickness homogeneity and quality can be produced. The capacitively coupled parallel plate plasma enhanced vapor deposition reactor has gas distribution unit with a multiple-stage showerhead constructed in such a way that it provides an independent adjustment of gas distribution and gas emission profile of the gas distribution unit.

Parallel plate reactor for uniform thin film deposition with reduced tool foot-print

A vacuum treatment installation has a vacuum receptacle with a first planar metallic electrode face, a second dielectric electrode face facing the first planar metallic electrode face which forms a surface of a dielectric areal configuration, a metallic coupling face facing a backside of the areal configuration, electric connections on the coupling and on the first electrode face, a gas line system through the coupling face and an areal distributed pattern of apertures through the areal configuration and wherein the areal dielectric configuration is formed by several ceramic tiles.

Vacuum treatment installation for the production of a disk-shaped workpiece based on a dielectric substrate

A composite solar collection module includes a thin film solar collection cell that is encapsulated between a transparent substrate, such as glass, on one side, and an electrically insulating film on the other. A metallic layer is disposed over the electrically insulating film to provide protection against diffusion of atmospheric species that may harm the thin film solar collection cell. The insulating and metallic layers are dimensioned so that a larger collection cell can be used to collect solar energy over a larger proportion of the available substrate surface area, without causing arcing between the cell edge and the metallic layer edge.

Solar cell module and method of encapsulating same

A method for producing a disk shaped workpiece with a dielectric substrate includes treatment in a plasma process volume between two electrode faces bounding a high-frequency plasma discharge. One electrode face is of dielectric material and is at a high-frequency potential with a varying distribution along the face. The other electrode face is metallic. Reactive gas is introduced into the process volume through an aperture pattern. The dielectric substrate, before treatment, is at least regionally coated with a layer material to whose specific resistanceapplies: 10&#x3a9;cm&#x2266;&#x2266;10&#x3a9;cm, and to the resulting surface resistance Rof the layer applies: 0&#x3c;R&#x2266;10&#x3a9;. Subsequently, the coated substrate is positioned on the metallic electrode face and is etched or coated reactively under plasma enhancement in the plasma process volume.

Method for manufacturing a plate-shaped workpiece

A vacuum transport chamber has a transport robot arrangement. A processing arrangement has at least one processing station communicating by at least one workpiece pass-through opening with the vacuum transport chamber. A loadlock arrangement communicates by at least one workpiece pass-through opening with an atmosphere outside the vacuum transport chamber and the processing arrangement. One single loadlock and processing tower is formed by the processing arrangement and the loadlock arrangement being arranged vertically on upon the other.

Apparatus for vacuum treating two dimensionally extended substrates and method for manufacturing such substrates

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Ruggell, Liechtenstein

Arthur Buechel