Varian Semiconductor Equipment Associates, Inc.

Arsen Babayan

Adrian Wilson

Herbert Piereder

A fault current limiter may include a current limiting leg to transmit a first current and a control leg in parallel with the current limiting leg, the control leg to transmit a second current. The control leg may include a plurality of solid state switches arranged in electrical series with one another; a plurality of current monitors arranged in electrical series with the plurality of solid state switches; and at least one triggering circuit, wherein the plurality of current monitors are electrically coupled to the at least one triggering circuit, and wherein the at least one triggering circuit is optically coupled to the plurality of solid state switches.

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Gloucester, MA, United States of America

Arsen Babayan