Other

Beijing Sevenstar Electronics Co., Ltd.

Arsalan Emami

Mitch Agamohamadi

Saeed Sedehi

Systems and methods to improve an industrial heater are disclosed. The heater comprises a horizontal cylinder oriented parallel to the ground and may encase an interior recess running the length of the heater. The heater may be divided into a plurality of sections or zones. One or more mid-rings may support the structure of the heater, and may be disposed at the intersections of adjacent sections or zones. A plurality of interior boards and/or insulation layers may line the interior fa&#xe7;ade, and may be configured to overlap each other and/or interlock together. The interlocking structure may be absent of any gap or space to prevent heat loss from the interior recess. One or more heat strips may be configured in a sinusoidal pattern. The strips may be mirrored on the opposite side of the interior recess, and may be configured to elongate in the direction opposite of gravity.

Industrial heater

The invention disclosed is methods, apparatus, and systems of a horizontal modular heater. Whereas the prior art, being heater of a single zone and singular structure, may not be able to provide the desired temperature profile nor efficient downtime during parts breakage is accordingly insufficient for the needs of the industry. The present invention then may be a furnace used in semiconductor manufacturing, of which may be a horizontal heater with multiple modules, of which may be connected in an ingenious method or structure to limit leakage and of which improves efficiency over previous heater designs heaters in the art.

Horizontal modular heater

A heater assembly with enhanced cooling pursuant to various embodiments described herein makes use of fluidic flow in the insulation or in the space used for insulation. By creating a natural convection or forced convection flow, the heater cools down faster, it can operate at lower temperatures and/or higher temperature precision, and it can improve temperature controllability by generating higher heat loss rates.

Heater elements with enhanced cooling

A modular heater includes multiple heater modules. The heater modules can include mating features, such as a tongue and groove seal, and/or soft seal, to prevent radiation, thermal convection and thermal conduction leakage. The heater module can also include heater elements, together with supports and expansion room for the heater elements.

Modular heater

Systems and methods are provided for a high performance heater. In an embodiment, the high performance heater comprises a first stackable tray comprising a first alignment pin that insulates a first heating element disposed in the first stackable tray; a second stackable tray comprising a second alignment pin that insulates a second heating element disposed in the second stackable tray, wherein a top of the first alignment pin fits in to a cut out of a bottom of the second alignment pin when the first and second stackable trays are stacked, and wherein the first and second stackable trays comprise one or more materials, an outer diameter and an inner diameter, and wherein an area between the outer diameter and the inner diameter of the stackable trays comprises at least one cut out portion that allows expansion of the material(s) when the high performance heater is at high temperatures.

Methods and systems for alignment of a high performance heater

Systems and methods are provided for a high performance heater. In an embodiment, the high performance heater comprises a first stackable tray comprising a first alignment pin that insulates a first heating element disposed in the first stackable tray; a second stackable tray comprising a second alignment pin that insulates a second heating element disposed in the second stackable tray, wherein a top of the first alignment pin fits into a cutout of a bottom of the second alignment pin when the first and second stackable trays are stacked, and wherein the first and second stackable trays comprise one or more materials, an outer diameter and an inner diameter, and wherein an area between the outer diameter and the inner diameter of the stackable trays comprises at least one cutout portion that allows expansion of the material(s) when the high performance heater is at high temperatures.

High performance heater

An embodiment of the present invention is a technique to automate transfer of parts for high throughput. A boat transfer unit (BTU) arm carrying a boat containing a plurality of parts is rotated from an initial position to a first position that is below a process chamber. The BTU arm engages a boat support that supports the boat. The BTU arm is moved upward to a second position such that the boat partially enters the process chamber at a distance D with respect to an entrance opening of the process chamber. An elevator arm carrying a pedestal is engaged to lower side of the boat support. The BTU arm is moved away from the second position. The elevator arm is moved upward to fully insert the boat inside the process chamber.

Growing community of inventors

Aliso Viejo, CA, United States of America

Arsalan Emami