Kla Tencor Corporation

Arrigo Benedetti

Lawrence Robert Miller

Mark J Roulo

Krishnamurthy Bhaskar

An inspection system having a sensor array that provides image data. A process node includes a memory to receive the image data, a commercially available central processing unit to receive and coprocess at least a first portion of the image data within the memory, and a field programmable gate array to receive and coprocess at least a second portion of the image data within the memory. In this manner, there are two elements in the process node that are used to simultaneously process the image data, and the image data analysis thereby proceeds at a much faster rate than it would with just a single processor in a commercially available computer. However, the system as described has very little custom hardware, and thus is relatively inexpensive, and highly versatile.

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Oakland, CA, United States of America

Arrigo Benedetti