Applied Materials, Inc.

Novelis, Inc.

Aron Rosenfeld

Hooman Hafezi

Manoocher Birang

Michael Xiaoxuan Yang

Saravjeet Singh

Zhi-Wen Sun

Joseph Frederick Behnke

Nicolay Kovarsky

John O Dukovic

A method and apparatus for adjusting an electric field of an electrochemical processing cell are provided. In one embodiment, a capacitive element is disposed in the processing solution. The strength, shape, or direction of the electric field in the processing solution may be modulated by charging and discharging the capacitive element in a controlled manner. Because the electric field is modulated with out passing a current from the capacitive element to the processing solution, electrochemical reactions do not occur on the interface of the capacitive element and the processing solution, thus, reduces complications caused by unwanted electrochemical reactions.

Electrolytic capacitor for electric field modulation

The present invention generally relates to apparatus and methods for plating conductive materials on a substrate. One embodiment of the present invention provides an apparatus for plating a conductive material on a substrate. The apparatus comprises a fluid basin configured to retain an electrolyte, a contact ring configured to support the substrate and contact the substrate electrically, and an anode assembly disposed in the fluid basin, wherein the anode assembly comprises a plurality of anode elements arranged in rows.

Electroplating apparatus and method based on an array of anodes

A method and apparatus for plating a metal onto a substrate. One embodiment of the present invention provides an apparatus for electroplating a substrate. The apparatus comprises a fluid basin, an anode disposed near a bottom of the fluid basin, a restrictor disposed above the anode, and a substrate support member configured to move the substrate within the fluid basin among different elevations relative to the restrictor. Plating profiles on the substrate may be adjusted by changing the elevation of the substrate during plating.

Apparatus and method for improving uniformity in electroplating

Generally, the process includes depositing a barrier layer on a feature formed in a dielectric layer, decorating the barrier layer with a metal, performing a grafting process, initiating a copper layer and then filing the feature by use of a bulk copper fill process. Copper features formed according to aspects described herein have desirable adhesion properties to a barrier layer formed on a semiconductor substrate and demonstrate enhanced electromigration and stress migration results in the fabricated devices formed on the substrate.

Method to deposit organic grafted film on barrier layer

A method and apparatus for plating a metal onto a substrate. One embodiment of the invention provides an apparatus for electrochemically plating a substrate. The apparatus comprises a fluid basin configured to retain a plating solution therein, an anode assembly disposed in the fluid basin, a substrate support member configured to support the substrate and contact the substrate electrically, and an encased auxiliary electrode assembly disposed in the fluid basin. The encased auxiliary electrode assembly generally comprises an auxiliary electrode disposed in a protective tube.

Auxiliary electrode encased in cation exchange membrane tube for electroplating cell

Generally, the process includes depositing a barrier layer and seed layer on a feature formed in a dielectric layer, performing a grafting process, initiating a copper layer and then filing the feature by use of a bulk copper fill process. Copper features formed according to aspects described herein have desirable adhesion properties to a barrier and seed layers formed on a semiconductor substrate and demonstrate enhanced electromigration and stress migration results in the fabricated devices formed on the substrate.

Grafted seed layer for electrochemical plating

A method of conducting a promotional contest by providing a portal that establishes a field for detecting the presence of a field-disturbing element, providing packages respectively having and lacking a concealed field-disturbing element, and distributing the packages randomly to different individuals who carry the packages past the portal so that a package with a field-disturbing element causes the portal to produce a signal indicating a winner of the contest. A can for beverages or the like having a field-disturbing element concealed thereon, for use in such a promotional contest. The element may be mounted in a peelable foil closure member covering an aperture in the can lid.

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Palo Alto, CA, United States of America

Aron Rosenfeld