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Applied Materials South East Asia Pte. Ltd.

Arnon Gratch

Nadav Grossinger

Nitay Romano

Shai Silberstein

Gilad Shomrony

An optical sensing device for using light to locate objects or features in a field of view comprises a light source; a controllable lens having two states and being controllable between them, for example a multifocal lens having two or more foci for focusing light from the light source; and a sensor able to sense light reflected from an object, to determine information of the object. The use of two or more foci adds dynamic range to optical sensing to allow for reliable detection over a wide range of distances.

Controllable optical sensing

Inspection of objects, such as semiconductor wafers, can be performed using a diluted scan wherein not all of an inspected area is actually imaged. Instead, a dilution plan can be devised based on the desired amount of area to be skipped and the particular parameters of the inspection, such as the size of each unit area to be imaged or not imaged and the distribution features of the wafer. When the same area is inspected in multiple wafers, the wafers can be inspected in sets using a dilution plan whereby a wafer (or inspected area) can be statistically inspected using diluted scans of the set of wafers. Similarly a die or group of dies of a specified type can be statistically inspected using diluted scans of a set of dies (or group of dies). When statistical inspection is used, the end results of such inspections, such as defect densities and distributions, can be corrected to account for inaccuracies that may be introduced when certain portions are imaged more often than others due to the dilution plan.

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Tel Aviv, Israel

Arnon Gratch