Aixtron Se

Arno Offermanns

Markus Gersdorff

Walter Franken

Robert Bartholomeus Jacques Oligschlaeger

A device for determining the partial pressure or the concentration of a steam in a volume, includes a sensor body that can be oscillated. The temperature of the sensor body can be controlled to a temperature below the condensation temperature of the steam, and the oscillation frequency of the sensor body is influenced by a mass accumulation of the condensed steam on a surface of the sensor body. Means are provided for generating a gas flow from the sensor surface in the direction of the volume through a steam transport channel that adjoins a window to the volume. In order to increase the maximum service life of the sensor body, the means for generating a gas flow has a slit nozzle designed as an annular channel.

Device and method for determining the concentration of a vapor

The invention relates to a device for depositing laterally structured layers on a substrate () situated on a substrate support (), using a shadow mask () lying flat on the substrate surface (') to be coated, the substrate support () having first magnetic zones () for magnetically attracting second magnetic zones () of the shadow mask () that are associated with these first magnetic zones (), wherein, before coating the substrate () and when the shadow mask () is lying on the substrate (), the first magnetic zones () may be brought into an active position in which the second magnetic zones () are drawn toward the substrate surface (&#x2032;), and, for placement or removal of the shadow mask (), the first magnetic zones may be brought into an inactive position in which the attractive force acting on the second magnetic zones () is reduced. It is important that the first magnetic zones () are formed from magnetic elements, in particular permanent magnetic elements, situated in recesses () in a substrate support surface (&#x2032;) of the substrate support (), which are spatially associated with the second magnetic zones ().

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Aldenhoven, Germany

Arno Offermanns