The Swatch Group Research and Development Ltd

Arne Kool

Pierry Vuille

Jean-Luc Bazin

Csilla Miko

Alexis Boulmay

Roger Cochand

A method for single or multiply charged ion implantation into a surface of a treated object, and a device for implementing the implantation method, the method including: directing towards the surface of the treated object an ion beam produced by an ion source of the electronic cyclotron resonance type; producing at least one primary electron beam and directing the primary electron beam so that it passes through the ion beam; and producing a secondary electron beam by reflecting the primary electron beam onto a target once the primary electron beam has traversed the ion beam, the target being oriented such that the secondary electron beam falls onto the surface of the treated object.

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Blonay, Switzerland

Arne Kool