Vortek Industries Ltd.

Mattson Technology, Inc

Mattson Technology Canada, Inc.

Arne Kjorvel

David Malcolm Camm

Greg Stuart

Steve McCoy

Mike Krasnich

Tony Komasa

Tilman Thrum

Igor Rudic

Rick Doolan

Tony Hewett

Joseph Reyers

Ludmila Shepelev

Alex Viel

Anthony J Housden

Chee Chin

Nicholas P Halpin

Dean A Parfeniuk

Andy J Frenz

An apparatus for producing electromagnetic radiation includes a flow generator configured to generate a flow of liquid along an inside surface of an envelope, first and second electrodes configured to generate an electrical arc within the envelope to produce the electromagnetic radiation, and an exhaust chamber extending outwardly beyond one of the electrodes, configured to accommodate a portion of the flow of liquid. In another aspect, the flow generator is electrically insulated. In another aspect, the electrodes are configured to generate an electrical discharge pulse to produce an irradiance flash, and the apparatus includes a removal device configured to remove particulate contamination from the liquid, the particulate contamination being released during the flash and being different than that released by the electrodes during continuous operation.

High-intensity electromagnetic radiation apparatus and methods

Apparatus and methods for producing electromagnetic radiation

An apparatus for producing high intensity radiation has electrodes positioned within an elongated cylindrical arc chamber across which an arc discharge can be established. Liquid is injected into the arc chamber to produce a vortex motion therein to form a cylindrical liquid wall adjacent to the chamber, which constricts the arc by cooling an outer periphery thereof. Gas is injected into the arc chamber to produce a vortex motion adjacent the cylindrical liquid wall. An exhaust structure actively exhausts the liquid and gas from the arc chamber to reduce turbulence and restriction of fluid. This permits attainment of higher flux densities in the arc, and/or extension of electrode life. Preferably, the liquid and gas are exhausted actively by means of an ejector pump which ejects pressurized liquid into the gas and liquid leaving the arc chamber. The ejector pump pressurizes the exhausted gas and liquid sufficiently to permit the gas to be separated and recycled back to the arc chamber, without requiring an additional compressor to increase gas pressure.

High intensity radiation apparatus and fluid recirculating system

A high intensity radiation source. A liquid vortex wall is formed on the inside surface of an arc chamber to restrict the diameter of an arc generated between electrodes. The liquid vortex wall is obtained by utilizing a vortex generating means which includes an annular restriction through which the liquid must pass prior to entering the arc chamber. The annular restriction is of a dimension sufficient to allow adequate pressure and velocity throughout the arc chamber and to reduce or eliminate flow irregularities which could be transmitted to the liquid wall in the arc chamber. A nozzle may provide for establishment of the required axial vortex flow motion of both the liquid and gas while the liquid and gas are physically separated prior to their entrance to the arc chamber. A discharge chamber adjacent the arc chamber is tapered smoothly to prevent flow disruptions and fin means on the electrode is provided to reduce gas and liquid flow in the opposite direction to that normally occurring in the arc chamber.

High intensity radiation apparatus having vortex restriction means

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Vancouver, Canada

Arne Kjorvel