Integrated Dynamics Engineering Gmbh

Arndt Evers

Han Hartgers

Frank Hofmann

Till Scharf

Simon Schadt

Ralf Wilhelm Tillmann

Andreas Birkner

An active vibration isolation system with a magnetic actuator where the magnetic actuator includes a coil carrier with at least one coil which engages in a magnetic actuator without touching it so that it takes the form of a linear motor. The magnetic actuator has a magnetic shield with an opening through which the coil carrier extends into the magnet carrier.

Vibration isolation system with one or more magnetic actuators

A vibration isolator with a pneumatic spring that is effective only in vertical direction, the pneumatic spring including a working space in which a vertically effective actuator is disposed.

Vibration isolator with a vertically effective pneumatic spring

An isolator for a stationary vibration isolation system, which is effective in the horizontal and vertical directions, the isolator comprising at least one pneumatic actuator.

Isolator for a stationary vibration isolation system

A pneumatic actuator configured for a stationary vibration isolation system which serves to accommodate equipment for processing semiconductor devices. The pneumatic actuator comprises a working space with a piston which divides the working space into a first and a second pressure chamber, and the piston is spaced apart from an inner surface of the working space by a gap, and the piston is movable only in an axial direction.

Pneumatic actuator and method for operating an active vibration isolation system

A maintenance apparatus, in particular for lifting and moving components of a system for processing semiconductor devices. The apparatus comprises a beam and an arm with means for lifting a component, the arm being mounted to the beam via a connecting unit and so as to be pivotable in a horizontal plane, wherein the connecting unit is displaceable along the beam, and wherein the arm is displaceable perpendicularly to the beam, and wherein a load accommodation means is provided on the pivotable arm.

Maintenance apparatus

The invention relates to a vibration isolator with a pneumatic spring. The vibration isolator comprises a leaf spring assembly for vertical isolation and a flexible rod or a buckling pendulum for horizontal isolation.

Vibration isolator with pneumatic spring

The invention relates to a vibration isolator that includes a coil spring. In a horizontal direction, the coil spring is stiffly coupled to the base or to the load to be isolated.

Vibration isolator with coil spring

The invention relates to a magnetic actor in which the permanent magnets are arranged in a Halbach configuration and inserted into a slide-in frame.

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Oestrich-Winkel, Germany

Arndt Evers