Microparts Gesellschaft Fur Mikrostrukturtechnik Mbh

Microparts Gmbh

Arnd Rogner

Holger Reinecke

Ulrich Sieber

Uwe Brenk

Helge Pannhoff

Ralf-Peter Peters

Friedolin Franz Noker

Nezih Unal

Andreas Neyer

Dierk Landwehr

Friedolin Franz Noeker

Gerd Prufer

Wolfgang A Heyde

Lothar Heinrich

Gerd Pruefer

The present invention concerns stepped mould inserts, a method of producing the same and high-precision stepped microstructure bodies moulded therewith. The present stepped mould inserts and method of producing the same are more simple than previous methods. The lithographically produced regions of a patterned resist layer, which are exposed by development on a flat plate, are filled with metal. The layer may be mechanically removed, down to a predetermined thickness. After the residues of the resist have been dissolved out, if necessary or desired, this operation is repeated from one to several times. The regions removed from the resist layer are filled with metal, covered and separated from the resist layer, thus providing a multistep metallic mould insert. High-precision microstructure bodies having a multistep structure are produced with the present stepped mould insert.

High-precision stepped microstructure bodies

Gases can be selectively detected by the utilization of a infrared spectrometer via their specific absorption in the infrared spectral range. The sensor of the present invention is developed for continuously controlling a gaseous stream or a space filled with gas with the sensor being a single-piece shaped part manufactured as a microstructured body. The space filled with gas to be tested is between a mirror grating and entrance and exit slits for IR-radiation. The sensor is compact and robust, suitable for portable instruments, and can be manufactured at low cost and in large numbers. The sensor can also be made of metal and can be used even at an increased temperature. By using the sensor of the present invention, the safety of systems in which flammable, toxic or other gases are contained or may occur can be considerably increased in an economic manner.

Infrared-spectrometric sensor for gases

Stepped mould inserts, high-precision stepped microstructure bodies, and

A method of manufacturing passive integrated optical devices from polymeric materials, the method comprising providing a step structure at each transition between a fiber alignment structure and the preform for the light waveguide structure, wherein both of these structures are produced simultaneously. Passive integrated optical devices having ridges or trenches with rectangular cross sections and manufactured to this method are also described.

Method of manufacturing devices for optical fiber networks, and devices

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Sprockhovel, Germany

Arnd Rogner