Commissariat À L'énergie Atomique Et Aux Énergies Alternatives

Commissariat a L'energie Atomique Et Aux Energies Alternatives

Institut Polytechnique De Grenoble

Arnaud Walther

Philippe Robert

Dirk Ettelt

Guillaume Jourdan

Bernard Diem

Patrice Rey

Olivier Redon

Robert Cuchet

Jerome Delamare

Jérôme Delamare

Jérôme Willemin

Jean-Baptiste Albertini

Robert Philippe

Aline Msaed

A gyroscope including a mass capable of movement due to excitation and a mass capable of movement due to detection, a mechanism applying an excitation signal to the excitation mass in a first direction, a mechanism detecting the movement of the detection mass in a second direction orthogonal to the first direction, a mechanism detecting the movement of the excitation mass in the second direction, and a processor processing detection signals emitted by the mechanism detecting movements of the detection mass and the mechanism detecting movements of the excitation mass in the second direction, to obtain a phase bias, quadrature bias, and amplification factor.

Gyroscope with simplified calibration and simplified calibration method for a gyroscope

A mechanical connection between two parts of a microelectromechanical and/or nanoelectromechanical structure forming a pivot with an axis of rotation pivot includes two first beams with an axis parallel to the pivot axis, the first beams configured to work in torsion, and two second beams with an axis orthogonal to the axis of the first beams, the second beams configured to work in bending, each one of the first and second beams being connected at their ends to the two parts of the structure.

Mechanical connection forming a pivot for MEMS and NEMS mechanical structures

A magnetic field sensor comprises a substrate and a moving part which is displaced when subjected to a Laplace force. There is a gauge for measuring the displacement of the moving part. There is a suspended lever that is rotationally displaced about an axis of rotation at right angles to the direction of displacement of the moving part. The lever is connected to the moving part to transmit displacement of the moving part to the lever to cause rotation of the lever about the axis of rotation. The lever is also connected to a first part of the gauge. The sensor comprises a hinge that connects the lever to the substrate. The hinge allows the rotation of the lever about its axis of rotation and is rigid to allow for a lever arm effect. The second part of the gauge is fixed with no degree of freedom to the substrate.

Sensor for magnetic fields with Laplace force

Gyrometer including a substrate and an inertial mass suspended above the substrate, the inertial mass including an excitation part and a detection part, means of moving the excitation part is movable in at least one direction contained in the plane of the inertial mass, and capacitive detection device detecting movement of the detection part outside the plane of the mass. The capacitive detection device includes comprising at least one suspended electrode, located above the detection part located facing the substrate so as to form a variable capacitor with the detection part, the electrode being held above the detection part by at least one pillar passing through the inertial mass.

Gyrometer with reduced parasitic capacitances

A device for measuring magnetic fields with Laplace force, comprising a substrate extending in a substrate plane, a first rigid frame in a first plane moveable relative to the substrate about a first rotation axis parallel to the substrate plane with a central through-recess. There is a fixed electrical conductor wound an axis perpendicular to the plane of the first frame. There a first hinge connecting the first rigid frame to the substrate with a first electrical track. There is a second hinge connected to the first rigid frame with a second electrical track. There is a first sensor for measuring of the angular displacement of the first rigid frame. The first hinge and the first electrical track are inside the central recess of the first rigid frame and the second hinge and the second electrical track are outside the central recess of the first rigid frame.

Device for measuring magnetic fields with Laplace force

The multiaxial inertial sensor of movements is a micro/nano sensor that makes it possible to couple at least one accelerometer with other structures, either accelerometers or gyroscopes, by an oscillating disk structure. The oscillating disk also forms an inertial sensor such as a gyrometer. This single-chip structure associating both gyroscopes and accelerometers makes it possible to achieve detections and measurements in up to 6 axes, in other words 3 accelerometer axes and 3 gyroscope axes, and to exert control by a single and unique electronic unit, thus permitting a single automatic control loop in excitation and a single electronic reading chip. Application to technologies known as MEMS.

Micro/nano multiaxial inertial sensor of movements

A process for producing a micromechanical structure including a substrate and a stack of at least two layers arranged on the substrate is provided. A mobile part is formed in the stack and a fixed part relative to the substrate is formed in the stack, and an opposite surface is formed between the fixed part and the mobile part, to present a stop device to limit displacement of the mobile part in a direction substantially perpendicular to the stack. The process uses at least one sacrificial layer between the substrate and the stack made of material suitable to be etched selectively relative to the materials of the stack.

Micromechanical structure comprising a mobile part having stops for out-of plane displacements of the structure and its production process

Inertial unit for the measurement of accelerations and/or rotations comprising four sensors, spread out on two intersecting axes, each sensor comprising two inertial masses, each inertial mass comprising a moveable excitation part and a moveable detection part, the moveable excitation parts of a sensor being separate from those of the other sensors, said unit also comprising means for exciting the excitation parts of the sensors and means for detecting the movement of the detection parts, the two inertial masses of each sensor) being mechanically coupled, the four sensors being coupled by elastically deformable mechanical coupling means and able to transmit the excitation vibrations from one axis to the other.

Inertial unit with several detection axes

The present invention relates to an inertial rotary movement microsensor for detecting a rotational movement around what is referred to as an axis of rotation (X), provided with a part that is movable relative to a fixed part, the movable part comprising an excitation mass configured to undergo an oscillating movement in an excitation direction (Z) by an exciter so as to generate a Coriolis force induced by the rotational movement, a detection mass kinematically connected to the excitation mass by a linkage configured to transmit the Coriolis force at least partly without transmitting the oscillating movement around the excitation axis at least partly, a detector configured to measure the Coriolis force transmitted to the detection mass, characterized in that the detector is provided with at least one strain gauge suspended between the detection mass and an anchoring part integral with the fixed part. Application to the technologies known as MEMS.

Inertial sensor having an oscillating rotating disk

A gradient sensor of a component of a magnetic field comprising at least one elementary sensor comprising a deformable mass () equipped with a permanent magnet () having a magnetization direction substantially colinear to the direction of the gradient of the component of the magnetic field to be acquired by the sensor. The deformable mass () is able to deform under the effect of a force exerted on the magnet by the gradient, the effect of this force being to shift it, by dragging the deformable mass (), in a direction substantially colinear to the component of the magnetic field for which the sensor has to acquire the gradient. The deformable mass () is anchored to a fixed support device () in at least two anchoring points () substantially opposite relative to the mass (). The elementary sensor also comprises measuring means () of at least one electric variable translating deformation or stress of the deformable mass () engendered by the gradient.

Gradient sensor of a component of a magnetic field with permanent magnet

A magnetic field sensor including a body including a magnetic mechanism capable of forming a torque applied on the body by action of an external magnetic field to be detected; a connector, separated from the body, mechanically connecting the body to an inlay portion of the sensor by at least one pivot link having an axis perpendicular to the direction of the magnetic field to be detected; a detector detecting stress applied by the body by action of the torque, separated from the connector and including at least one suspended stress gauge including a first part mechanically connected to the inlay portion, a second part mechanically connected to the body, and a third part provided between the first and second parts and suspended between the inlay portion and the body.

Magnetic field sensor with suspended stress gauge

A pressure sensor of the MEMS and/or NEMS type is disclosed, including:

MEMS dynamic pressure sensor, in particular for applications to microphone production

A MEMS or NEMS device for detecting a force following a given direction, comprising a support and at least one seismic mass capable of moving under the effect of the force to be measured in the direction of the force, and a detector for detecting the movement of the seismic mass, the seismic mass being articulated relative to the support by at least one pivot link, and an actuator capable of varying the distance between the axis of the pivot link and the center of gravity of the exertion of the force on the seismic mass.

Growing community of inventors

Grenoble, France

Arnaud Walther