Centre National De La Recherche Scientifique

Université De Limoges

Arnaud Pothier

Pierre Blondy

Stanis Courreges

Jean-Christophe Orlianges

The present invention relates to an microelectromechanical system () comprising: a base () comprising a substrate () and a substrate electrode (); a moveable beam (); a voltage generator () able to generate a potential difference between the beam () and the substrate electrode (); and at least one mechanical stop () connected to the beam and designed to make contact with the base () when a potential difference is applied between the beam () and the substrate electrode (), thereby defining an air-filled cavity () between the beam () and the substrate electrode (), characterized in that it furthermore comprises an electrical-charge blocking element () placed on the substrate (), said element facing the at least one mechanical stop () and being electrically connected to the beam ().

Growing community of inventors

Condat sur Vienne, France

Arnaud Pothier