Axcelis Technologies, Inc.

Other

Armin Huseinovic

Joseph Ferrara

Brian Terry

William Davis Lee

James P Bennett

Mark R Amato

Daniel J Raymond

Jillian Reno

Lou Wainwright

The invention comprises a segmented rolling floor apparatus and method of use thereof, such as for use in a charged particle cancer therapy system. The segmented rolling floor comprises a first spool and a second spool, attached to opposite ends of the rolling floor, which cooperatively wind and unwind the rolling floor. The segmented rolling floor circumferentially surrounds a nozzle system penetrating through an aperture in the segmented rolling floor, where the nozzle system is used to deliver charged particles, from an accelerator, to a tumor of a patient. The rolling floor and nozzle systems move at respective rates maintaining the nozzle system in the aperture allowing for a safe/walkable floor while allowing treatment of the tumor as a gantry rotates the nozzle system and delivers protons to the tumor from positions above and below the floor.

Gantry charged particle nozzle system&#x2014;rolling floor interface apparatus and method of use thereof

An ion implantation system has a process chamber having a process environment, and an ion implantation apparatus configured to implant ions into a workpiece supported by a chuck within the process chamber. A load lock chamber isolates the process (vacuum) environment from an atmospheric environment, wherein a load lock workpiece support supports the workpiece therein. An isolation chamber is coupled to the process chamber with a pre-implant cooling environment defined therein. An isolation gate valve selectively isolates the pre-implant cooling environment from the process environment wherein the isolation chamber comprises a pre-implant cooling workpiece support for supporting and cooling the workpiece. The isolation gate valve is the only access path for the workpiece to enter and exit the isolation chamber. A pressurized gas selectively pressurizes the pre-implant cooling environment to a pre-implant cooling pressure that is greater than the process pressure for expeditious cooling of the workpiece. A workpiece transfer arm transfer the workpiece between the load lock chamber, isolation chamber, and chuck. A controller controls the workpiece transfer arm selectively cools the workpiece to a pre-implant cooling temperature in the isolation chamber at the pre-implant cooling pressure via a control of the isolation gate valve, pre-implant cooling workpiece support, and pressurized gas source.

High throughput cooled ion implantation system and method

An ion implantation system has an ion implantation apparatus coupled to first and second dual load lock assemblies, each having a respective first and second chamber separated by a common wall. Each first chamber has a pre-heat apparatus configured to heat a workpiece to a first temperature. Each second chamber has a post-cool apparatus configured to cool the workpiece to a second temperature. A thermal chuck retains the workpiece in a process chamber for ion implantation, and the thermal chuck is configured to heat the workpiece to a third temperature. A pump and vent are in selective fluid communication with the first and second chambers. A controller is configured to heat the workpiece to the first temperature in an atmospheric environment via the pre-heat apparatus, to heat the workpiece to the second temperature via the thermal chuck, to implant ions into the workpiece via the ion implantation apparatus, and to transfer the workpiece between atmospheric and vacuum environments via a control of the pre-heat apparatus, post-cool apparatus, pump, vent, and thermal chuck.

High throughput heated ion implantation system and method

Growing community of inventors

Winchester, MA, United States of America

Armin Huseinovic