Pfeiffer Vacuum Gmbh

Balzers-Pfeiffer Gmbh

Armin Conrad

Heinrich Lotz

Sebastian Oberbeck

Peter Fahrenbach

Wolfgang Eberl

Florian Bader

Jörg Stanzel

Mirko Mekota

Wolfgang Bremer

Aleksandr Shirinov

Matthias Mädler

Bernd Koci

Torbjorn Lembke

Otto Ganschow

Andreas Rippl

Carsten Reese

Peter Vorwerk

Adrian Wirth

Pascal Wielsch

Swen Söhngen

A membrane vacuum pump has at least one working space which is bounded by a membrane deformable to change the size of the working space and by a wall in which at least one inlet and at least one outlet are formed for a medium which is sucked into the working space which increases in size in so doing in a suction phase and is expelled via the outlet from the working space which decreases in size in so doing in a compression phase. The membrane vacuum pump furthermore has a controllable actuator unit for deforming the membrane by a contactless action on the membrane by means of electrical and/or magnetic fields.

Membrane vacuum pump

The invention relates to an ionizing pump stage, in particular for a vacuum pump, comprising an inlet for gas entering into the pump stage; an ionizing section communicating with the inlet in a gas-conductive manner and an ionizing device for ionizing the gas entered into the ionizing section; an acceleration device for accelerating the ionized gas present in the ionizing section in the conveying direction; and a neutralizing section following the ionizing section in the conveying direction and communicating with the ionizing section in a gas-conductive manner and a neutralizing device for the electrical neutralizing of the ionized gas entering into the neutralizing section.

Ionizing pump stage

An apparatus for kinetic energy storage includes an electrical machine operable at least in one of motor mode and generator mode, and at least one energy recovery system for an intermediate storage of a produced kinetic energy and which converts the kinetic energy into an electrical energy, with, the at least one energy recovery system having at least one flywheel body formed as a rotor, and a stator and with at least one of the rotor and the stator being formed as at least one vacuum pump stage.

Apparatus for kinetic energy storage having a flywheel with pump-active surfaces

An arrangement includes a vacuum pump having a rotor, and a drive unit for driving the rotor and having at least one magnetic interference field-generating component and at least one compensation coil for compensating the magnetic interference field generated by the at least one component.

Arrangement with a vacuum pump and method of compensating magnetic field produced by magnetic interference field of at least one vacuum pump component

A device for measuring pressure having at least one pressure sensor with at least one active sensor surface, an oscillating and/or variable temperature counter-surface arranged opposite the at least one sensor surface, wherein the sensor surface and the counter-surface are arranged in a hollow body, and the hollow body has at least one opening, and wherein at least one alternating signal amplifier is provided.

Device for measuring a pressure with at least one pressure sensor having at least one active sensor surface

A turbomolecular pump includes a plurality of alternatively axially arranged one behind another, rotor and stator discs () provided with blades (), with the blades () located in vicinity of the high vacuum side having a blade angle (&#x3b1;) that is steeper than blade angle (&#x3b1;) of the blades () located in vicinity of the vacuum side, and with the blade angle (&#x3b1;) of the blades () located in the vicinity of the vacuum side () amounting to less than 8&#xb0;.

Turbomolecular pump

A device for contactless measurement of a rotor temperature includes a magnet supported on the rotor, electric coils which are arranged at the stator with which the rotor cooperates, and an electronic unit for measuring a voltage induced in the coil and including a component that converts the measured voltage into a temperature-proportional signal.

Device for contactless measurement of rotor temperatures

A gas friction pump, comprising stationary pump-active components () and rotatable pump-active components () secured on a rotatable rotor shaft (), wherein the rotor shaft is supported with a bearing () at the high-vacuum-side end and a bearing arrangement at a fore-vacuum side end, characterized in that the high-vacuum side bearing is formed as a conventional bearing, and the fore-vacuum bearing arrangement contains at least one gas bearing. In an advantageous embodiment, the gas bearing is formed as a module and can be brought in engagement with a cylindrical portion of the housing and secured therein.

Gas friction pump

A vacuum pump system includes at least one high-vacuum pump, a fore-vacuum pump, and at least one intermediate pump, arranged between the at least one high-vacuum pump and the fore-vacuum pump and having its inlet connected directly and exclusively with the outlet of the high-vacuum pump.

Vacuum pump system for light gases

A gas friction pump includes stationary () and rotatable () pump-active elements secured on a rotor shaft () and forming with the rotor shaft components of the rotor, with the rotor shaft () being supported by two, spaced from each other, radial bearings (), of which one is located closer to the gravity center of the rotor than the other, and an axial bearing (), and with the radial bearing (), which is located closer to the gravity center of the rotor, being formed as a gas bearing, and another radial bearing () being formed as a non-gas bearing.

A gas friction pump, including a housing having a suction opening, a gas outlet opening, and a plurality of rotatable and stationary components arranged in the housing and having a pump-active structure for pumping gases and maintaining a pressure ratio, and an additional gas inlet formed as a longitudinal opening extending, in a longitudinal direction thereof, over a portion of an outer edge of a rotatable component.

A gas friction pump including a housing ( ) having a suction opening ( ) and a gas outlet opening ( ), rotor ( ) and stator ( ) components arranged in the housing ( ) for delivery of gases and for obtaining a pressure ratio; and an additional, at least one-stage, concave pump unit ( ) provided at a side of the suction opening ( ) and having a gas delivery structure, with the additional pump unit ( ) being so formed that gas delivery takes place in a radial direction, and with rotor components ( ) of the additional pump unit ( ) being supported on the same rotor shaft ( ) as the rotor components of the pump itself.

A gas friction pump including a plurality of pumping active rotor and stator components arranged in the pump housing for delivery of gases and for producing a compression ration and having a diameter larger than a diameter of the suction opening formed in the housing, and a modified rotor component located adjacent to the suction opening and having a radial extent which increases starting from the suction opening in a direction of a radial extent of the pumping active rotor and stator components.

A gas friction pump including a housing having a suction opening and an exhaust opening, main rotor and stator components arranged in the housing and cooperating with each other for delivering gases and for producing a pressure difference, and an auxiliary pumping unit provided at a side of the suction opening and having a gas delivery structure that provides for gas delivery in a radial direction, with the auxiliary pumping unit being formed of at least one stage and having auxiliary rotor and stator components, with the auxiliary rotor components being supported on the shaft which supports the main rotor components.

A vacuum pump, including a housing having inlet and outlet; a shaft arranged in the housing and supported bearing provided in the housing, drive for rotating the shaft; and a plurality of pumping units arranged in the housing and formed each of rotational and stationary gas delivery components with the rotational components being supported on the shaft and the stationary components being connected with the housing, at least one of the pumping units consisting of a plurality of connected parallel to each other and arranged one after another in an axial direction, molecular pumping stages with each pumping stage being formed based on Gaede principle; with the molecular pumping stages being connected with each other in common connection channels.

Growing community of inventors

Herborn, Germany

Armin Conrad