Heuristics Physics Laboratories, Inc.

Neuristics Physics Laboratory, Inc.

Arman Sagatelian

Yervant D Lepejian

John M Caywood

Hovhannes Ghukasyan

Julie D Segal

David Muradian

Alvin Jee

Gurgen Lachinian

A software development tool employing workflows for developing user interactive programs is described. The tool includes means for displaying a workspace on a computer screen, and means for displaying objects on the computer screen that are individually selectable to be placed and coupled together in the workspace to define a workflow for a user interactive program. Several objects have interactively alterable operation parameters. One object performs an interactively alterable switch function for directing data flow within the workflow. Another object facilitates branch processing according to a user indicated selection from displayed information generated by the user interactive program. Another object facilitates assigning a name to an input port of another object so that data may be directly provided to that input port. Another object prompts a user for input when a condition is met while executing the user interactive program. Also described is a method performing these functions of the software development tool.

Software development tool employing workflows for developing user interactive programs

A method for determining fault sources for device failures comprises: generating failure signatures of fault sources for preselected tests; generating aggregate failure signatures for individual of the fault sources from the failure signatures; generating aggregate device test data from test data of a device for the preselected tests; generating aggregate matches by comparing the aggregate failure signatures with the aggregate device test data; and determining fault sources for device failures by comparing the test data of the device with ones of the failure signatures of fault sources corresponding to the aggregate matches. An apparatus configured to perform the method comprises at least one circuit.

Method and apparatus for determining fault sources for device failures

A first method for determining the offset between the origins of the coordinate systems used for inspection of at least two different defect inspections of a wafer with integrated circuits disposed on it, comprises creating a database containing location data for defects disposed on at least two inspection layers of an integrated circuit wafer; defining maximum offsets for interlayer defects; defining minimum spacings for intralayer defects; for all defects having spacings larger than the minimum spacings searching the database for interlayer defect pairs having offsets smaller than the maximum offsets; calculating an actual offset for each interlayer defect pair; determining whether the actual offsets are randomly distributed; identifying dense zones for the actual offsets if they are not randomly distributed; and developing an estimate of the offset between the origins of the at least two layers and a confidence value for the estimate for said actual offsets. A second method comprises identifying from the database at least one die having a number of defects nd wherein 0&lE;nd&lE;k where k is an integer less than or equal to 5, identifying all interlayer defect pairs on the at least one die, and calculating an actual offset for each interlayer defect pair in place of defining maximum offsets for interlayer defects and defining minimum spacings for intralayer defects.

Correction of overlay offset between inspection layers in integrated circuits

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Sunnyvale, CA, United States of America

Arman Sagatelian