Motorola Corporation

Arlette Marty-Blavier

Juergen A Foerstner

Myriam Combes

Guy Hautekiet

A method of manufacturing an integrated circuit having a buried layer of a low doped type of conductivity (2) and a buried layer of a highly doped type of the same conductivity (3) by masking a substrate (1) so as to define open areas on the substrate where it is desired to provide the two buried layers and doping the open areas of the substrate with a low concentration of dopants to form the low doped type of buried layer (2) is formed. Then one open area where the low doped type of buried layer (2) is formed is masked and the other open area is doped with a high concentration of dopants to form the highly doped type of buried layer (3).

Method of making BiCMOS circuit

A method of manufacturing both bipolar and CMOS devices including vertical PNP, NPN, PMOS and NMOS devices on the same chip, includes the steps of, simultaneously forming an N+ region (14) on part of a P base region (11) of the vertical NPN device to form the emitter contact region thereof, an N+ region (14) on a part of an N- epitaxial layer (5) of the vertical NPN device to form the collector contact region thereof, N+ regions (14) on first and second parts of a P well region (8) of the NMOS device to form the source and drain thereof, and an N+ region (14) on an N base region (9) of the vertical PNP device to form the base contact thereof. In a further simultaneous step, there are formed P+ regions (15) on the P-well (8) and N base (9) regions of the vertical PNP device to form the collector and emitter contact regions thereof, P+ regions (15) on first and second parts of the N- epitaxial layer (5) of the PMOS device to form the source and drain thereof, and a P+ region (15) on part of the P base region (11) of the vertical NPN device to form the base contact region thereof.

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Frouzins, France

Arlette Marty-Blavier