Orbotech Limited

Eyeway Vision Ltd.

Voxelsensors Srl

Arkady Bronfman

Boris Greenberg

Dan Zemer

Semion Kofman

Yaron Zimmerman

Fares Marjieh

Shlomi Efrati

Yechiel Slor

Roni Tzubery

Some embodiments are directed to a system comprising a MEMS based actuator unit and a control electric circuit. The actuator unit comprising one or more MEMS actuators, each comprising a stator and a rotor and configured to define a payload position in response to electric potential between said stator and rotor. The electric circuit comprising one or more amplifiers configured to provide electric control signal to the one or more MEMS actuators to selectively vary position of said payload. The electric circuit comprises a sensing circuit configured for providing an alternating carrier signal and for monitoring said carrier signal to generate data on impedance of said one or more MEMS actuators indicative of position of the rotor with respect to the stator of said one or more MEMS actuators.

MEMS based light deflecting device and method

A flat surface tilting device including a selectably positionable flat surface element assembly defining a flat surface element having a flat surface and a pivot location portion, the pivot location portion being generally centered with respect to the flat surface, a pivot support element pivotably engaging the pivot location portion, an electromagnet, fixed with respect to the pivot support element and arranged for application of magnetic force in a direction generally perpendicular to the flat surface thereby to pivot the flat surface element about the pivot support element, a sensor for sensing the position of the flat surface element and feedback circuitry operative in response to an output of the sensor to govern operation of the electromagnet.

Tilting device

Growing community of inventors

Beer-Sheva, Israel

Arkady Bronfman