Daicel Chemical Industries, Ltd.

Daicel Corporation

Daicel-Evonik Ltd.

Daicel-Degussa Ltd.

Arimichi Okumura

Keizo Inoue

Hiroto Miyake

Masaya Omura

Tomoya Mizuta

Kazuki Okamoto

Katsuhiro Nakaguchi

Takuya Osaka

Naotaka Nishio

Provided is a sheet-shaped mold possessing a high strength and having a low breakage rate in demolding even in a case where the mold is thin and has a large-area. The sheet-shaped mold is prepared by combining a cured silicone rubber containing a polyorganosiloxane and a fiber for reinforcing the cured silicone rubber. The fiber may comprise a cellulose nanofiber. The sheet-shaped mold may have an uneven pattern on at least one surface (or side) thereof. The fiber may be surface-treated with a hydrophobizing agent. The fiber may forma nonwoven fabric, and the nonwoven fabric may be impregnated with the cured silicone rubber. The cured silicone rubber may comprise a two-component curable silicone rubber having a polydimethylsiloxane unit. The sheet-shaped mold may be a mold for nanoimprint lithography using a photo-curable resin.

Sheet-shaped mold, production method therefor, and application therefor

A polymer for lithographic purposes has at least a repeating structural unit represented by following General Formula (I). In Formula (I), R, R, R, and Reach independently represent hydrogen atom, a halogen atom, cyano group, an alkyl group, or a haloalkyl group; Rand Reach independently represent hydrogen atom, cyano group, etc.; Xand Xeach independently represent single bond, or a substituted or unsubstituted bivalent alkylene, alkenylene, or cycloalkylene group, etc.; Xand Xeach independently represent single bond or &#x2014;CO&#x2014;; R, R, R, and Reach independently represent hydrogen atom, an alkyl group, or a cycloalkyl group. The polymer for lithographic purposes shows good balance between line edge roughness (LER) and etching resistance and allows very fine and uniform patterning. 

Polymer for lithographic purposes and method for producing same

Resin particles are produced by adding a liquid material having a boiling point of 100&#xb0; C. or higher to an aqueous dispersion of resin particles to yield a mixture, recovering a wet cake from the mixture by filtration, and drying the wet cake. A water-soluble material is preferably used as the liquid material. The liquid material may also be at least one compound selected from compounds listed in The Japanese Standards of Cosmetic Ingredients, The Japanese Cosmetic Ingredients Codex, The Pharmacopoeia of Japan, and The Japan's Specifications and Standards for Food Additives. According to this method, there are provided resin particles which are resistant to coagulation upon drying and are satisfactorily dispersible in other materials.

Method for the production of resin particles

Fine spherical thermoplastic resin particles are produced by preparing a resin composition including a matrix of a water-soluble material, and fine particles of a water-insoluble thermoplastic resin dispersed in the matrix, the fine particles and the matrix each being melted or softened in the resin composition; cooling and solidifying the resin composition under such conditions that the resin composition does not undergo deformation due to stress; and removing the water-soluble material by washing with water to thereby yield fine spherical particles containing the water-insoluble thermoplastic resin. This method has wide applicability, applies less loads on the environment, does not require special devices, can be easily conducted, and can efficiently produce such particles. The resulting particles are highly spherical.

Production of fine spherical thermoplastic resin particles

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Himeji, Japan

Arimichi Okumura